MKS HPS® Series 974 QuadMag MicroPirani™ Piezo Cold Cathode Transducer, KF-40, RS-232.
MKS Part Number: 974-91020
The 974 QuadMag offers a measurement range from
1x10-8 to 1500 Torr and combines cold cathode inverted
magnetron, MicroPirani™ and Piezo differential sensor
technologies. The 974 has been specifically designed
for pressure measurement within a vacuum loadlock. It
has the capability to replace multiple pressure measurement
devices on a loadlock with its absolute pressure
measurement from atmosphere to 10-8Torr and atmospheric
switching capabilities. Subsequently, OEM’s can
reduce costs with a simplified loadlock design. The 974
can be used on loadlocks or any vacuum chamber requiring
both absolute pressure measurement and atmospheric
switching capabilities.
The Series 974 QuadMag has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement.
The 974 QuadMag transducers also has an analog pressure output
of 0.5VDC/decade that can be interfaced to external
analog equipment for pressure readout or control. Other
analog outputs and curves can be selected via the digital
user interface.The Series 974 QuadMag has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The 974 QuadMag Transducer has a user changeable cold cathode anode module that offers easy serviceability without disassembling of transducer
electronics. Customers requiring both a power supply and display can use the 974 QuadMag with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.
Specifications and prices are subject to change without notice. HPS® is a registered trademark and MicroPirani™ is a Registered Trademark of ©2009 MKS Instruments, Inc. All rights reserved.
Options, (PN) Part Number and Pricing : NEW MKS HPS® Series 974 QuadMag MicroPirani™ Piezo Cold Cathode Transducer
NW25 KF, RS-232, SUBD 15pinHD male-no relay
PN 974-21020, 2009 Price $1295
2 3/4" CF, RS-232, SUBD 15pinHD male-no relay
PN 974-71020, 2009 Price $1365
NW40 KF, RS-232, SUBD 15pinHD male-no relay
PN 974-91020, 2009 Price $1325
NW25 KF, RS-485, SUBD 15pinHD male-no relay
PN 974-22020, 2009 Price $1295
2 3/4" CF, RS-485, SUBD 15pinHD male-no relay
PN 974-72020, 2009 Price $1335
NW40 KF, RS-485, SUBD 15pinHD male-no relay
PN 974-92020, 2009 Price $1275
NW25 KF, RS-232, SUBD 15pinHD male-3 relays
PN 974-21030, 2009 Price $1305
2 3/4" CF, RS-232, SUBD 15pinHD male-3 relays
PN 974-71030, 2009 Price $1375
NW40 KF, RS-232, SUBD 15pinHD male-3 relays
PN 974-91030, 2009 Price $1315
NW25 KF, RS-485, SUBD 15pinHD male-3 relays
PN 974-22030, 2009 Price $1305
2 3/4" CF, RS-485, SUBD 15pinHD male-3 relays
PN 974-72030, 2009 Price $1395
NW40 KF, RS-485, SUBD 15pinHD male-3 relays
PN 974-92030, 2009 Price $1315
●All Prices subject to change without notice●