Leybold Variable Leak Valve with Isolation Valve. For manually controlled admission of gas in connection with plasma processes (sputtering, etching and glow discharge cleaning). See Specifications graphic below.

The Agilent Variable Leak Valve can be added to any vacuum system to establish an adjustable leak. It offers unprecedented control sensitivity and stability with leak rates as small as 1 x 10 Torr-liters per second and provides an increasing rate of change as the size of the leak increases. This gives precise control in proportion to the size of the leak. The entire valve, including the drive mechanism, is bakeable to 450°C in either the open or closed position. This valve can operate in a vacuum range of atmosphere to below 10 Torr (mbar) and has an Inlet Gas Pressure up to a maximum of 500 psi. The valve is shipped in a closed, leak-tight position, lubricated and ready for installation. The main flange connection on which the variable leak valve is mounted mates with any 2 3/4 inch O.D. ConFlat flange. The Inlet gas connection is made through a standard 1 1/3in Mini-ConFlat flange. Leak rate adjustment is controlled with knurled knobs. To open a leak, the knurled knobs must be turned (together) counterclockwise, a minimum of two full turns. The valve is closed by turning the knobs (together) clockwise to the stop position against the handle.

This Agilent Tool and Repair Kit is an optional item for Agilent Variable Leak Valve CF 2.75" X 1.33" (PN: 951-5106). The Tool Kit (pictured below) includes handle with collar adjusting knobs (15), rod assembly (18), fine drive screw assembly (16), gasket assembly (1), sapphire removal tool, brush, lubricant, 1/4 and 5/16 hex key wrenches, three spring washers (6) and an instruction manual CD. We offer all the necessary tools to make repairs and adjustments to the variable leak valve below in our Related Products section, including replacement parts such as the complete repair/tool kit and gasket assemblies. Agilent Repair & Tool Kit for Variable Leak Valve, PN: 9620014

This is an Agilent Tool made for assisting in the removal of the Shappire Seal from the Agilent Variable Leak Valve (PN: 951-5106). This tool is also available in the Repair Kit for the variable leak valve which is show in the picture below. We offer all the necessary tools to make repairs and adjustments to the variable leak valve below in our Related Products section, including replacement parts such as the complete repair/tool kit and gasket assemblies. Removal Tool Part Number: SR0061417400

This is the Optically-Flat Sapphire Assembly Replacement for the Agilent Variable Leak Valve (PN: 951-5106). The sapphire assembly is designed to be replaced using a special removal tool, also made by Agilent. The assembly should arrive without any chips, scratches or cracks to ensure proper operation of the Agilent Variable Leak Valve. We offer all the necessary tools to make repairs and adjustments to the variable leak valve in our Related Products section below, including replacement parts such as the complete repair/tool kit and gasket assemblies. Replacement Sapphire Assembly, PN 9530072

This is the NEW Gasket Assembly Replacement Part for Agilent Variable Leak Valve (part number 951-5106). Please follow the instructions below to inspect, clean or replace the gasket assembly. How to Inspect, Clean or Replace gasket assembly: Inspect the copper alloy gasket to be sure that it is clean, smooth, free of oxide, and protrudes above the surface of the gasket collar by at least 0.002 inch. A hand lens or microscope will facilitate inspection of the surface. If the top surface of the gasket is scored, scratched, or nicked, the gasket assembly must be replaced. If the copper portion of the assembly does not protrude at least 0.002 inch above the collar,

This is the NEW Agilent Flare Fitting Adapter Kit with the Mini-CF 1 1/3 (1.33 inch) for the Variable Leak Valve (part number 951-5106). The kit includes the following components: Qty 1 – Adapter Flare Mini-CF 1 1/3 (1.33 inch) FittingQty 6 – Mini Flange Screws 8-32”Qty 6 – Nut for Mini Flange 8-32” Qty 10 – Gasket for Mini FlangeQty 1 – Fitting Nut (28629886-00)Qty 1 – Fitting Sleeve (28629887-00) We offer all the necessary tools to make repairs and adjustments to the variable leak valve below in our Related Products section, including replacement parts such as the complete repair/tool kit and gasket assemblies. Flare Fitting Adapter Kit with Mini CF 1 1/3 inch, PN 9515117