MKS HPS 974 QuadMag MicroPirani Piezo Cold Cathode Transducer KF40 RS-232, 10-10 to 1000 Torr. PN: 974-91020
MKS HPS® Series 974 QuadMag MicroPirani™ Piezo Cold Cathode Transducer, KF-40, RS-232.
MKS Part Number: 974-91020


The 974 QuadMag offers a measurement range from 1x10-8 to 1500 Torr and combines cold cathode inverted magnetron, MicroPirani™ and Piezo differential sensor technologies. The 974 has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design. The 974 can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities. The Series 974 QuadMag has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement.

The 974 QuadMag transducers also has an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface.The Series 974 QuadMag has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The 974 QuadMag Transducer has a user changeable cold cathode anode module that offers easy serviceability without disassembling of transducer electronics. Customers requiring both a power supply and display can use the 974 QuadMag with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.


  • Specifications and prices are subject to change without notice. HPS® is a registered trademark and MicroPirani™ is a Registered Trademark of ©2009 MKS Instruments, Inc. All rights reserved.


    Options, (PN) Part Number and Pricing : NEW MKS HPS® Series 974 QuadMag MicroPirani™ Piezo Cold Cathode Transducer

    NW25 KF, RS-232, SUBD 15pinHD male-no relay
    PN 974-21020, 2009 Price $1295
    2 3/4" CF, RS-232, SUBD 15pinHD male-no relay
    PN 974-71020, 2009 Price $1365
    NW40 KF, RS-232, SUBD 15pinHD male-no relay
    PN 974-91020, 2009 Price $1325
    NW25 KF, RS-485, SUBD 15pinHD male-no relay
    PN 974-22020, 2009 Price $1295
    2 3/4" CF, RS-485, SUBD 15pinHD male-no relay
    PN 974-72020, 2009 Price $1335
    NW40 KF, RS-485, SUBD 15pinHD male-no relay
    PN 974-92020, 2009 Price $1275
    NW25 KF, RS-232, SUBD 15pinHD male-3 relays
    PN 974-21030, 2009 Price $1305
    2 3/4" CF, RS-232, SUBD 15pinHD male-3 relays
    PN 974-71030, 2009 Price $1375
    NW40 KF, RS-232, SUBD 15pinHD male-3 relays
    PN 974-91030, 2009 Price $1315
    NW25 KF, RS-485, SUBD 15pinHD male-3 relays
    PN 974-22030, 2009 Price $1305
    2 3/4" CF, RS-485, SUBD 15pinHD male-3 relays
    PN 974-72030, 2009 Price $1395
    NW40 KF, RS-485, SUBD 15pinHD male-3 relays
    PN 974-92030, 2009 Price $1315
    ●All Prices subject to change without notice●
    Product: MKS HPS 974 QuadMag MicroPirani Piezo Cold Cathode Transducer KF40 RS-232, 10-10 to 1000 Torr. PN: 974-91020
    Condition:      New
    Warranty:     Against Product Defect
    Part Number: P102870
    Price: $2,005.88