Edwards Model 250 Water Cooled Exhaust Trap.
Edwards Part Number: A53114000.
The Edwards Model 250 Water Cooled Exhaust Trap cools the exhaust gases from the pump and causes
particulates to collect in the trap. This prevents the collection of particulates in the
exhaust system. The exhaust trap is designed to connect to a pump which is used in an
LPCVD nitride process using dichlorosilane or hexachlorodisilane and ammonia.
The exhaust trap is not suitable for connection to a pump which is used in other processes.
The Edwards model 250 trap is designed to fit BOC Edwards CDP and QDP dry pumps and Drystar MKI,
MKII and QMKII dry pumping systems. The system must incorporate a pressure switch to
shut down the pump if the exhaust system becomes blocked.
The exhaust trap has a main outer body which is mounted on a baseframe. The trap body height can be adjusted in the baseframe to fit the trap to different pumps. The baseframe has castors for ease of movement, and levelling feet so
that it can be securely located in its operating position. The model 250 water-cooled exhaust trap has Edwards part numberA53114000.
Edwards Model 250 Water Cooled Exhaust Trap Specifications:
- Fits Edwards dry pumps: CDP and QDP dry pumps and Drystar MKI, MKII and QMKII dry pumping systems
- Material: trap body is AIS 304L stainless steel and the water-cooling coils are copper
- Liner replacement part number is A53115020
For complete specifications please download the instruction manual.
