Rebuilt Edwards im Interface Module for iQDP, iH, & iL Semiconductor Vacuum Pump. PN: A528-44-463
The Interface Module allows you to use your own control equipment to control the operation of and to monitor the status of an iH, iL or iQ dry pumping systems.
The Edwards Interface Module is designed for use with the Edwards iQ, iH & iL dry pumping systems and allows you to connect the pumping system to other equipment. For example, your Process Tool or other control equipment. This module has 2 Interface cards, the Tool Interface Card and the Auxiliary Interface card. This is model A528-44-463R.
For installation, operation and maintenance instructions see the .pdf Instruction Manual below at AVAILABLE DOWNLOADS.
