MKS R-Series Gate Valve ISO-F 100, DN100, Pneumatic, 24 VDC Solenoid, Dual Position Indicator Switches (N/O), 4 inch ID, Viton Seals,
Bolted Down Flange (M8 x 1.25), Stainless Steel Body.
These MKS R-Series gate valves are optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. These R-Series gate valves are well suited for high vacuum (HV) applications down to 1x10
-7 Torr and have options, including pneumatic and position indicators. The R-Series employs an elastomer shaft seal for the actuator seal, which enables high performance in a cost effective, high value package for roughing vacuum applications. This listing is for the ISO-100 bolt down vacuum flange version with pneumatic air actuator including a 24 VDC solenoid valve and dual position indicator switches (normally open).
Product Features:
- Excellent temperature uniformity ensures no cold spots on
internal surfaces
- DN80 and DN100 > 200,000 cycles
- DN160 > 100,000 cycles
- DN80, DN100 and DN160mm sizes available
Product Configuration:
- Valve Bore/Flange Size: DN100
- Materials: Stainless Steel
- Acutation: Pneumatic
- Seal Materials: Viton/FKM
- Limit Switches: Both Switches Normally Open (N/O)
- Magnetic Reed Switch: Current rating < 80mA
- Solenoids: 24 VDC
- Heating Options: Heatable to 105°C
- Pressure Range (High Vacuum HV): 1x10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar)
- Pneumatic Pressure: 5.4 ±1.3 atm (80 ±20 psig)
- Actuator Seal: Elastomer shaft seal - Viton
- Side to Side Leak Rate: 1x10-9 atm*cc/sec
- External Leak Rate: 1x10-9 atm*cc/sec
- Max Delta Pressure - Operating: 22.5 Torr (30 mbar) chamber side high
- Max Delta Pressure - Closed: 1.6 atm, either direction
