These MKS R-Series gate valves are optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. These R-Series gate valves are well suited for high vacuum (HV) applications down to 1x10^-7 Torr and have options, including pneumatic and position indicators. The R-Series employs an elastomer shaft seal for the actuator seal, which enables high performance in a cost effective, high value package for roughing vacuum applications. This listing is for the ISO-100 bolt down vacuum flange version with pneumatic air actuator including a 24 VDC solenoid valve and dual position indicator switches (normally open).

Product Features:

• Excellent temperature uniformity ensures no cold spots on internal surfaces
• DN80 and DN100 > 200,000 cycles
• DN160 > 100,000 cycles
• DN80, DN100 and DN160mm sizes available

Product Configuration:

• Valve Bore/Flange Size: DN100
• Materials: Stainless Steel
• Acutation: Pneumatic
• Seal Materials: Viton/FKM
• Limit Switches: Both Switches Normally Open (N/O)
• Magnetic Reed Switch: Current rating < 80mA
• Solenoids: 24 VDC
• Heating Options: Heatable to 105°C
• Pressure Range (High Vacuum HV): 1x10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar)
• Pneumatic Pressure: 5.4 ±1.3 atm (80 ±20 psig)
• Actuator Seal: Elastomer shaft seal - Viton
• Side to Side Leak Rate: 1x10-9 atm*cc/sec
• External Leak Rate: 1x10-9 atm*cc/sec
• Max Delta Pressure - Operating: 22.5 Torr (30 mbar) chamber side high
• Max Delta Pressure - Closed: 1.6 atm, either direction