The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. This is a raw unit without cards. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables and optional cards for the MKS 946 are available on this website.

The MKS Control Card Mass Flow Controller is compatible with the 946 and dual Mass Flow controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

The MKS GM50A Mass Flow Controller is capable of being configured to control N2 or equivalent, having a Full-Scale Flow Range of 20 sccm and a control range of 0.4 to 20 sccm. It has a 15-pin D-subminiature analog connector with tied grounds, a 0-5 VDC flow input/output signal and a Swagelok® 4 VCR® male input and output fittings. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 50 sccm and a control range of 1 to 50 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 100 sccm and a control range of 2 to 100 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 200 sccm and a control range of 4 to 200 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR®. It has a Full Scale Flow Range of 500 sccm and a control range of 10 to 500 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Digital calibration yields 1% of set point accuracy on the calibration gas. Typical response times are on the order of 500 milliseconds. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 1000 sccm and a control range of 20 to 1000 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS Mass Flow Controller Cable connects 179, 1179, 1462, 1479, 1559, 2179, GE50A, GM50A, IE50A, IM50A, IM250A, P250A mass flow controllers to 946 controllers with 15-pin type D High-density subminiature to 15-pin standard subminiature connectors. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.

The MKS Mass Flow Controller Cable connects 179, 1179, 1462, 1479, 1559, 2179, GE50A, GM50A, IE50A, IM50A, IM250A, P250A mass flow controllers to 946 controllers with 15-pin type D High-density subminiature to 15-pin standard subminiature connectors. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.

The MKS Vacuum Sensor Card supports capacitance manometers and Piezo sensors with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (

MKS Part Number PN: 627HU2TBE1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices.

MKS Part Number PN: 627HU5TBD1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices.

MKS Part Number PN: : 627H.1TBD1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices.

MKS Part Number PN: 627H01TBC1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices.

MKS Part Number PN: 627H11TBC1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices.

MKS Part Number PN: 627H12TBC1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices.

MKS Part Number PN: 627H13TBC1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices.

The MKS vacuum gauge signal cable connects 937B or 946 controllers to 626 or 627 manometers. It has 9-pin type D subminiature and 15-pin type D subminiature connectors. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B.

The MKS vacuum gauge signal cable connects 937B or 946 controllers to 626 or 627 manometers. It has 9-pin type D subminiature and 15-pin type D subminiature connectors. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B.

Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty.

Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty.

Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty.

Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty.

Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty.

Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty.

Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty.

The MKS Manometer cable connects 937B or 946 controllers to Series 722 capacitance manometers. It has 9-pin type D subminiature connectors. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B.

The MKS Manometer cable connects 937B or 946 controllers to Series 722 Manometers, DB9 Male to DB9 Female. It has 9-pin type D subminiature connectors. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B.

The MKS Vacuum Sensor Card supports dual pirani convection sensors and is used with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

The MKS HPS® 317 Convection-Enhanced Pirani Sensor provides dependable and stable pressure measurement at a very low cost. Since the only materials exposed to vacuum are stainless steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable for UHV applications. The platinum filament effectively eliminates any reading variance throughout a convection sensor’s higher measuring range. More accurate than a thermocouple sensor, the 317 Sensor measures over a wider pressure range and responds more rapidly to process pressure changes. The upper measuring limit of a convection-enhanced Pirani sensor is increased over that of a traditional Pirani sensor from 100 Torr to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates for any changes in room temperature ranging from 10° to 50°C.

The MKS HPS® 317 Convection-Enhanced Pirani Sensor provides dependable and stable pressure measurement at a very low cost. Since the only materials exposed to vacuum are stainless steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable for UHV applications. The platinum filament effectively eliminates any reading variance throughout a convection sensor’s higher measuring range. More accurate than a thermocouple sensor, the 317 Sensor measures over a wider pressure range and responds more rapidly to process pressure changes. The upper measuring limit of a convection-enhanced Pirani sensor is increased over that of a traditional Pirani sensor from 100 Torr to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates for any changes in room temperature ranging from 10° to 50°C.

The MKS HPS® 317 Convection-Enhanced Pirani Sensor provides dependable and stable pressure measurement at a very low cost, Compatible with MKS 947 Convection Enhanced Pirani Gauge Controller. Since the only materials exposed to vacuum are stainless steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable for UHV applications. The platinum filament effectively eliminates any reading variance throughout a convection sensor’s higher measuring range. More accurate than a thermocouple sensor, the 317 Sensor measures over a wider pressure range and responds more rapidly to process pressure changes. The upper measuring limit of a convection-enhanced Pirani sensor is increased over that of a traditional Pirani sensor from 0.001 to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates for any changes in room temperature ranging from 10° to 50°C.

The MKS HPS® 317 Convection-Enhanced Pirani Sensor provides dependable and stable pressure measurement at a very low cost, Compatible with MKS 947 Convection Enhanced Pirani Gauge Controller. Since the only materials exposed to vacuum are stainless steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable for UHV applications. The platinum filament effectively eliminates any reading variance throughout a convection sensor’s higher measuring range. More accurate than a thermocouple sensor, the 317 Sensor measures over a wider pressure range and responds more rapidly to process pressure changes. The upper measuring limit of a convection-enhanced Pirani sensor is increased over that of a traditional Pirani sensor from 0.001 to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates for any changes in room temperature ranging from 10° to 50°C.

The MKS vacuum gauge signal cable connects 345 or 317 vacuum gauge sensors to 945, 947, 937B, or 946 controllers. It connects to the back of the MKS controllers and to the side of the MKS 345 or 317 Pirani Sensor. This is the Cable ONLY. The Series 947 Convection-Enhanced Pirani Controller offers many standard features and is easy to use. An analog output signal proportional to pressure is standard and is accessible from the rear of the controller, there is where this cable is connected. Processes are controlled with two independent relay set points that are standard on this single-channel controller. The relays can be set to trip anywhere within the controller’s set point range. All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. Adjust set points from the front panel while viewing the large, easy-to-read display. Set point activation is shown with red LED indicators. Set points can be checked at any time with no break in process control.

The MKS vacuum gauge signal cable connects 345 or 317 vacuum gauge sensors to 945, 947, 937B, and 946 controllers. It connects to the back of the MKS controllers and to the side of the MKS 345 or 317 Pirani Sensor. This is the Cable ONLY. The Series 947 Convection-Enhanced Pirani Controller offers many standard features and is easy to use. An analog output signal proportional to pressure is standard and is accessible from the rear of the controller, there is where this cable is connected. Processes are controlled with two independent relay set points that are standard on this single-channel controller. The relays can be set to trip anywhere within the controller’s set point range. All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. Adjust set points from the front panel while viewing the large, easy-to-read display. Set point activation is shown with red LED indicators. Set points can be checked at any time with no break in process control.

The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is not avaliable and is replaced with the MKS Granville Phillips 475).

The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller is replaced by the MKS Granville Phillips 475, not included).

The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

The MKS vacuum gauge signal cable connects 937B controllers to GP275 vacuum gauges. It connects to the back of the MKS controllers and to the side of the GP275 vacuum gauges. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B.

The MKS vacuum gauge signal cable connects 937B controllers to GP275 vacuum gauges. It connects to the back of the MKS controllers and to the side of the GP275 vacuum gauges. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B.

The MKS Vacuum Sensor Card Cold Cathode is used with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

Using an inverted magnetron design, the 423 I-Mag® sensor can operate at pressures much lower than a traditional Penning cold cathode sensor, as low as 10-11 Torr with the proper controller. This increased pressure range makes the HPS® Cold Cathode sensor ideal for UHV use. A unique design feature of the HPS® Cold Cathode sensor is a second feedthrough for ion collection. In an ordinary single feedthrough design, any current leakage between the anode and ground would result in pressure measurement errors. Only the ion current from the cathode contributes to a measurement reading in a dual feedthrough design, making it ideal for process monitoring. With no filament to burn out, the 423 I-Mag® sensor is not ruined by sudden inrushes of air and is resistant to vibration damage. Additionally, there is no need to adjust the emission current or to degas the gauge, reducing response time to pressure changes. If bakeout is required, the magnets and sensor connectors can be removed and the sensor can be baked to 400°C.

Using an inverted magnetron design, the 423 I-Mag Sensor can operate at pressures much lower than a traditional Penning cold cathode sensor, as low as 10 Torr with the proper controller. This increased pressure range makes the HPS Cold Cathode sensor ideal for UHV use. A unique design feature of the HPS Cold Cathode sensor is a second feedthrough for ion collection. In an ordinary single feedthrough design, any current leakage between the anode and ground would result in pressure measurement errors. Only the ion current from the cathode contributes to a measurement reading in a dual feedthrough design, making it ideal for process monitoring. With no filament to burn out, the 423 I-Mag sensor is not ruined by sudden inrushes of air and is resistant to vibration damage. Additionally, there is no need to adjust the emission current or to degas the gauge, reducing response time to pressure changes. If bakeout is required, the magnets and sensor connectors can be removed and the sensor can be baked to 400°C. This is a Brand New Cold Cathode Sensor ONLY the MKS signal cable and MKS 943 Controller for this unit are sold separetely on this website. A complete specification brochure and operations manual are available for download in PDF format below.

The MKS Manometer cable connects 946 controllers to 423 I-Mag® Cold Cathode sensor. This is the cable ONLY. The series 937B digital combination vacuum gauge controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

The MKS Manometer cable connects 946 controllers to 423 I-Mag Cold Cathode Sensor. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

to 1x10 Torr, CF-2.75 in. Flange Fitting. The MKS 431 Cold Cathode Vacuum Sensor features a 1x10 to 1x10 Torr vacuum measurement range, high operating temperature and a 2.75 inch size CF flange fitting. It is based on the ionization probability of the gas, with the ionization as a result of a high voltage discharge of electrons. These cold cathode pressure vacuum sensors are based on an inverted magnetron design, for an increased measurement range. The dual feedthrough for ion collection is a unique feature, making the pressure reading more accurate than other cold cathode vacuum and pressure sensors. Signal cables for this cold cathode vacuum sensor are available on this website.

The MKS Manometer cable connects 937B or 946 controllers to 431 I-Mag® Cold Cathode Sensor. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

The MKS Manometer cable connects 937B or 946 controllers to 431 I-Mag® Cold Cathode Sensor. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

The MKS Vacuum Sensor Card Cold Cathode is used with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

to 1x10 Torr, CF-2.75 in Flange Fitting. The MKS Nude Tube Vacuum Sensor features a Yttria-coated Iridium filament for a 1x10 to 1x10 Torr vacuum measurement range and a 2.75 in. CF flange fitting. This Bayard-Alpert style ionization vacuum sensor, which uses a fine wire collector located in the center of a grid. Because of its small area, few x-rays hit the collector, and a vacuum gauge can measure pressures to very low levels. Because the sensing portion of the tube is located within the vacuum system and experiences the system true pressure, nude tubes give a representative pressure measurement and respond more quickly than a glass envelope sensor to pressure changes. Signal cables for this cold cathode vacuum sensor are available on this website.

to 1x10 Torr, CF-2.75 in Flange Fitting. The MKS Nude Tube Vacuum Sensor features a tungsten filament for a 1x10 to 1x10 Torr vacuum measurement range and a 2.75 in. CF flange fitting. This Bayard-Alpert style ionization vacuum sensor, which uses a fine wire collector located in the center of a grid. Because of its small area, few x-rays hit the collector, and a vacuum gauge can measure pressures to very low levels. Because the sensing portion of the tube is located within the vacuum system and experiences the system true pressure, nude tubes give a representative pressure measurement and respond more quickly than a glass envelope sensor to pressure changes. Signal cables for this cold cathode vacuum sensor are available on this website.

The MKS Manometer cable connects 937B or 946 to Hot Cathode Low Power Nude. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

The MKS Manometer cable connects 937B or 946 to Hot Cathode Low Power Nude. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-02000SV valve features a 2000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is Swagelok-TM Swagelok Company

When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-10000SV valve features a 10000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is scc/sec He. Swagelok-TM Swagelok Company

When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-05000RV valve features a 5,000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is scc/sec He. Swagelok-TM Swagelok Company

The MKS Mass Flow Controller cable connects 946 Controller to 248D Flow Control Valves. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.

The MKS Mass Flow Controller cable connects 946 Controller to 248D Flow Control Valves. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.

The MKS Half Rack Mounting Kit is compatible with series 937B and 946 Vacuum Gauge Controllers. This is the hardware ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.