MKS HPS® Series 317 Convection Enhanced Pirani Sensor KF16 NW16 (PN 103170010SH) (Compatible with MKS 947 Convection Enhanced Pirani Gauge Controller)
The MKS HPS® 317 Convection-Enhanced Pirani Sensor provides dependable and stable pressure measurement at a very low cost.
Since the only materials exposed to vacuum are stainless
steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable
for UHV applications. The platinum filament effectively
eliminates any reading variance throughout a convection
sensor’s higher measuring range.
More accurate than a thermocouple sensor, the 317
Sensor measures over a wider pressure range and
responds more rapidly to process pressure changes.
The upper measuring limit of a convection-enhanced
Pirani sensor is increased over that of a traditional Pirani sensor from 100 Torr to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates
for any changes in room temperature ranging from
10° to 50°C.
Like all thermal conductivity sensors, the 317 sensor is
innately gas-type sensitive. This feature makes it a simple
solution for locating medium to fine leaks in vacuum systems.
It complements a mass spectrometer leak detector,
which is more efficient in finding smaller leaks.
The sensor, which is shielded against RF noise, meets CE
mark requirements and can be baked to 100°C.
This 317 Sensor include standard
vacuum connections such as this KF16 NW16
flange. The cable for this sensor is not included but available in standard 10 feet lengths. The
317 Sensor can be used with the Series 947
Convection Pirani Vacuum Gauge Controller also sold on this website.
A complete specification brochure and operations manual are available download in PDF format below.
