HVA Ultra-High Vacuum UHV Pneumatic Gate Valve Conflat CF 6.0 in. Flange, Viton Gate and OFHC Copper Bonnet Seals, 304 Stainless Steel.
Conflat CF 6.0” (DN100) Bolt Down Flange with 5/16-24 UNF Threads. Includes Built-In Reed Switch Position Indicators.
HVA Part Number: 11220-0400R.
These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have a Conflat CF 6.0 inch (DN100) vacuum flange with 5/16-24 UNF blind-tapped holes. They are rated for ultra-high vacuum (UHV) and follow vacuum technology standards for knife-edge flanges as described in ISO 3669:2020. HVA Part Number: 11220-0400R.
HVA pneumatically operated ultra-high vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate seals are made of Viton fluoroelastomer (FKM) material. Bonnet seals are made of OFHC Copper. Bellows are welded to the bonnet for leak-free operation. These valves are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service.
HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10
-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves.
HVA gate valves with Conflat CF flanges are rated for ultra-high vacuum applications and can attain ultimate pressures in the 10
-10 Torr range due to the metal-to-metal bonnet seal. HVA gate valves have a helium leak rate of 1.5 x 10
-10 Torr l/sec and are bakeable to 200 °C with the valve open, or 150 °C with the valve closed.
These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry.
HVA gate valves are available in high vacuum and ultra-high vacuum varieties in the following sizes:
- Quick flanged sizes KF-16, KF-25, KF-40, and KF-50
- ISO LF flanged ISO-63, -100, -160, -200, -250, -320, -400, and -500 sizes
- ASA ANSI sizes 2, 4, and 6 inch sizes
- Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes
The installation manual and operating instructions are available in the downloads.