This 390411 Total Pressure Micro-Ion Module works with the Granville Phillips Vacuum Quality Monitor System (VQM) The Granville-Phillips Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precision indication of vacuum chamber differential pressure from ambient. The unique sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. This small module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space. The full range pressure measurement is output as a single analog signal or available through optional serial RS-485 or DeviceNet digital interfaces. The RS-485 and DeviceNet versions have up to three optional setpoint relays can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.

This 390411 Total Pressure Micro-Ion Module works with the Granville Phillips Vacuum Quality Monitor System (VQM). The Granville-Phillips Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precision indication of vacuum chamber differential pressure from ambient. The unique sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. This small module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space. The full range pressure measurement is output as a single analog signal or available through optional serial RS-485 or DeviceNet digital interfaces. The RS-485 and DeviceNet versions have up to three optional setpoint relays can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.

Pressure Measurement of 1x10-9 Torr. For Vacuum Quality Monitor (VQM) 830 or 835. This 390802 Total Pressure Micro-Ion Module works with the MKS Granville Phillips Vacuum Quality Monitor System (VQM) 830 or 835 Power Mass Spectrometer Gauge. VQM. The MKS Granville-Phillips Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precision indication of vacuum chamber differential pressure from ambient. The unique sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. This small module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space. The full range pressure measurement is output as a single analog signal or available through optional serial RS-485 or DeviceNet digital interfaces. The RS-485 and DeviceNet versions have up to three optional setpoint relays can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.

This is a Granville Phillips MKS 24VDC Power Supply Transformer for GP 385 or GP 390 Micro-Ion ATM Modules Analog RS-485.

This hardware/bolt kit is for connecting an MKS Granville Phillips VQM 830/835MS Gauge to a 2.75 in. CF flange and includes 6 flange bolts and washers, 3 plate nuts, and 1 copper gasket; PN 801274-1.