MKS Granville Phillips 390 Series Micro ATM Module Gauge, 2.75 in. 2 Setpoints CF, Digital Display, Dual Yttria-coated Iridium ion gauge filaments,
Pressure Measurement of 1x10-9 Torr. For Vacuum Quality Monitor (VQM) 830 or 835. PN: 390802-2-YG-T
This 390802 Total Pressure Micro-Ion Module works with the
MKS Granville Phillips Vacuum Quality Monitor System (VQM)
830 or 835 Power Mass Spectrometer Gauge. VQM.
The MKS Granville-Phillips Micro-Ion ATM module combines proven
Micro-Ion ionization gauge technology with a miniature Conductron
heat loss sensor and two Piezo resistive sensors to provide accurate,
continuous pressure measurement from high vacuum to atmosphere.
Using its diaphragm sensors, this product is capable of providing accurate absolute
pressure up to atmosphere along with precision indication of vacuum chamber differential
pressure from ambient. The unique sensor design eliminates thermal effects that can
influence the performance of the heat loss sensor at higher pressures. This small module
combines all four sensors and control electronics in a compact modular design, reducing
the number of gauges required on a chamber and minimizing the required space.
The full range pressure measurement is output as a single analog signal or available
through optional serial RS-485 or DeviceNet digital interfaces. The RS-485 and
DeviceNet versions have up to three optional setpoint relays can be configured for process
control, with the ability to assign the relays at any pressure across the vacuum pressure
range or to a specific differential pressure value.
BENEFITS INCLUDE:
•Continuous pressure measurement from 1 x 10-9 high vacuum to atmosphere.
• Precision differential
pressure measurement
at atmosphere.
• Eliminates need for discrete
atmospheric switches.
• Eliminates need for three
separate sensors.
• Dual ionization gauge
filaments increase
equipment uptime.
• Automation of ionization
gauge activation and
deactivation.
• Optional setpoint relays
for process control.
• Field replaceable
gauge assembly.
• Analog, RS-485 or
DeviceNet output available.
• Optional graphics
LCD display.
Modular vacuum gauges are an ideal solution for applications that do not need front panel displays and controls. These compact, convenient, reliable, cost-saving modules have the control electronics mounted directly on the gauge. The all-metal package provides a rugged enclosure and a high level of immunity to electrical noise. Mini-Convectron Modules use the latest electronics technology to operate the MKS Granville-Phillips®Convectron®Gauge. The Convectron Gauge has become an industry standard. It is a unique variation of thermal conductivity gauges where pressure measurement is based on the rate of heat loss from a sensor wire. Unlike traditional thermocouple and Pirani gauges that use only conductive heat loss, Convectron Gauges take advantage of heat loss due to convection at higher pressures. This extends the range of accurate, repeatable measurement to atmosphere.