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Keyword       Ideal Spectroscopy Part Number       Manufacturer Part Number

× Molecular-Spectroscopy Optical-Table-Accessories Absorption-Spectroscopy-Gas-Cells Ultra-High Purity Gas Products Pulse-Valves-For-Jet-Cooling Vacuum-Pressure-Measurement Fittings-and-Flanges Vacuum-Valves Vacuum-Pumps Modular-Vacuum-Chambers

Condition:
  Rebuilt
Part Number:
  P1010243
Warranty:
  90-Days

Available Now: 
1  



$8,500.00


Print Version

Edwards CTI Brooks Cryo-Torr 250F Ultra-High Vacuum Semiconductor Cryopump, non-On-Board, LF ISO 250, Three 3 Phase, Rebuilt


Edwards CTI Brooks Cryo-Torr 250F Ultra-High Vacuum Semiconductor Cryopump, LF ISO 250, Three 3 Phase, Rebuilt, 6500 l/s Water, 2200 l/s Air, 1800 l/s Argon, Rebuilt.
Edwards CTI Brooks Part Number: 8116086G002.

The Edwards CTI-Cryogenics (now Edwards) Cryo-Torr OB250F, three (3) phase, cryopump is specially designed and constructed for the enhanced performance and tight space requirements for use in the semiconductor industry.

This cryopump has an ISO 250 inlet flange and a standard KF-25 roughing pump flange. It is capable of 10-8 Torr ultra-high vacuum (UHV) with rated pumping speeds of:
  • Water ………. 6500 l/sec
  • Air ………..…. 2200 l/sec
  • Hydrogen ..…. 3200 l/sec
  • Argon ………. 1800 l/sec

This Brooks/Edwards CTI Cryo-Torr OB250F three (3) phase pump runs on ONLY on three (3) phase power. Electrical power is supplied by a special CTI three phase motor controller.

The CTI three phase Cryo-Torr 250F cryopump exposes no moving parts, operating fluids, or backing pumps to the vacuum, which eliminates the possibility of system back streaming or process contamination from the cryopump itself.



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PDF Logo Brooks On-Board Cryopump Installation & Maintenance Manual.pdf

PDF Logo CTI On-Board Programming and Operation manual.pdf

PDF Logo CTI On-Board networking of Pumps.pdf

PDF Logo CTI Three Phase Motor Controller for 3 Phase Cryo-Torr Cryopumps.pdf

PDF Logo Ideal Vacuum Company Overview Brochure.pdf



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CONTACT US
Ideal Spectroscopy
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealspectroscopy.com



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