Edwards CTI Brooks Cryo-Torr 250F Ultra-High Vacuum Semiconductor Cryopump, LF ISO 250, Three 3 Phase, Rebuilt, 6500 l/s Water, 2200 l/s Air, 1800 l/s Argon, Rebuilt.
Edwards CTI Brooks Part Number: 8116086G002.
The Edwards CTI-Cryogenics (now Edwards) Cryo-Torr OB250F, three (3) phase, cryopump is specially designed and constructed for the enhanced performance and tight space requirements for use in the semiconductor industry.
This cryopump has an ISO 250 inlet flange and a standard KF-25 roughing pump flange. It is capable of 10-8 Torr ultra-high vacuum (UHV) with rated pumping speeds of:
- Water ………. 6500 l/sec
- Air ………..…. 2200 l/sec
- Hydrogen ..…. 3200 l/sec
- Argon ………. 1800 l/sec
This Brooks/Edwards CTI Cryo-Torr OB250F three (3) phase pump runs on ONLY on three (3) phase power. Electrical power is supplied by a special CTI three phase motor controller.
The CTI three phase Cryo-Torr 250F cryopump exposes no moving parts, operating fluids, or backing pumps to the vacuum, which eliminates the possibility of system back streaming or process contamination from the cryopump itself.
