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Keyword       Ideal Spectroscopy Part Number       Manufacturer Part Number

× Molecular-Spectroscopy Optical-Table-Accessories Absorption-Spectroscopy-Gas-Cells Ultra-High Purity Gas Products Pulse-Valves-For-Jet-Cooling Vacuum-Pressure-Measurement Fittings-and-Flanges Vacuum-Valves Vacuum-Pumps Modular-Vacuum-Chambers

Condition:
  New
Part Number:
  P1012634
Warranty:
  Full Manufacturer's Warranty
Out of Stock  
Expecting:   1
Anticipated Arrival:  1 on 2025-01-24



$26,127.74


Regular Price: $29,030.82

On Sale Flyer
Print Version

Ebara ESR20N-HT Multistage Dry Vacuum Pump, Pumping Speed 45 to 70 CFM (1300 - 2000 l/m), With Heated Silincer, Water Cooled, 3-Phase, 200-220V, 60Hz. PN: 203537


Ebara ESR20N-HT Multistage Dry Vacuum Pump, Pumping Speed 45 to 70 CFM (1300 - 2000 l/m), With Heated Silincer, Clean to Medium Duty Processes, Water Cooled, 3-Phase, 200-220V, 60Hz.
Ebara Part Number: 203537.

The Ebara ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The Ebara ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr. This listing is for the sale of the Ebara ESR20N-HT Multistage Dry Vacuum Pump, 120cfm 2000l/m, With Heated Silincer, Clean to Medium Duty Processes, Water Cooled, 200-220V / 3Ph, PN: 203537.

    Applications

  • Sputtering
  • PVD
  • Load Lock and Transfer
  • Ashing
  • Ion Implanter
  • Etch
  • Clean Gases and Processes

    Benefits and Features of the Ebara EV-A series dry rotary lobe pumps.

  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • No Nitrogen purge required for ESR20N in clean applications
  • Variable pumping speed to match application requirements
  • High performance brushless DC motors
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked





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PDF Logo Ebara ESR Series Dry Vacuum Pump Specifications Datasheet.pdf



You may wish to consider the following products:

Ideal Vacuum Logo Water Mark
CONTACT US
Ideal Spectroscopy
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealspectroscopy.com



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