The Ebara ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The Ebara ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr. This listing is for the sale of the Ebara ESR20N-HT Multistage Dry Vacuum Pump, 120cfm 2000l/m, With Heated Silincer, Clean to Medium Duty Processes, Water Cooled, 200-220V / 3Ph, PN: 203537.

Applications


• Sputtering
• PVD
• Load Lock and Transfer
• Ashing
• Ion Implanter
• Etch
• Clean Gases and Processes

Benefits and Features of the Ebara EV-A series dry rotary lobe pumps.


• Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
• No Nitrogen purge required for ESR20N in clean applications
• Variable pumping speed to match application requirements
• High performance brushless DC motors
• State-of-the-art control and monitoring devices
• Idle mode can be employed for increased utility savings
• SEMI S2 assessed, NRTL Listed, CE Marked