Specifications
Pumping Speed, Operating Range
4,500 l/s air, 5,625 l/s He/H₂
Maximum Pumping Speed
8,000 l/s air w/standard cold cap
Maximum Throughput
3.3 T-l/s (8.4 mbar-l/s) in operating range, 7.5 T-l/s (10.0 mbar-l/s) @ 0.01 Torr
Operating Range
1.4x10⁻³ to < 5x10⁻⁹ Torr at 4,400 W. (1.9 x 10⁻³ to < 6.5 x 10⁻⁹ mbar)
Maximum Forepressure
No Load: 0.65 Torr (0.85 mbar)
Recommended Backing Pump
≥ 30 cfm (51 m³/hr)
Backstreaming Rate
< 1.0 x 10⁻⁴ mg/cm²/min (with standard cold cap)
Warmup Time
15 minutes
Cooldown Time
25 minutes (with quick cool coil)
Fluid Charge
1,000 cc
Electrical Requirements
3 ph, 50/60 Hz, 208/380/480 VAC
Pump Power
4,400 Watts
Cooling Water Requirements
0.40 gpm (80 l/h)
Water Connections
⅛ in. FPT Tee
VHS-400 Diffusion Pump Replacement Parts List
Standard Cold Cap Assembly K4823301 1
Jet Assembly F0428401 2
Jet Coupling L6367301 3
Splash Baffle F0431301 4
Foreline Baffle Assembly F0435301 5
Sight Glass Repair Kit consisting of: L8908301 6
Sight Glass
L8816001
5.1
Gasket, Teflon
L9694001
5.1
O-ring, Viton, Parker No. 2-113
CommI
5.1
O-ring, Viton, Parker No. 2-226
CommI
5.1
Thermal Switch Includes: L8912301 7
Switch (set at 300 °F – 147 °C) 642906025 7a
Lug 648056680 7b
Wire
656179100
7c
Box Insulator
89867001
7d
Heater wire, 10 AWG, 42 inches (3 per pump required)
X3901-68003
8
Heater Wiring Kit, Includes: L8913301
15 ft. wire
L8913301 5.1
Nickel lug
648056680
5.1
Terminal Strip Molex 39100-1512
648091065
5.1
Heaters (two heaters required per pump)
9
208 V / 2200 watt Heater Element 647310140 5.1
240 V / 2200 watt Heater Element, 1Ph 647310150 5.1
380 V / 2200 watt Heater Element 647310160 5.1
480 V / 2200 watt Heater Element, wired open Delta, unbalanced load 647310170 5.1
208 V / 2550 watt Heater Element 647310145 5.1
240 V / 2550 watt Heater Element, 1Ph 647310155 5.1
380 V / 2550 watt Heater Element, wired open Delta, unbalanced load 647310165 5.1
480 V / 2550 watt Heater Element, wired open Delta, unbalanced load 647310175 5.1
Heater Crush Plate (replace when either heater is replaced) K7667001 10
Heater Clamping Plate A36 Steel K4928001 11
Heater Clamping Plate Retrofit, Slotted R2667301
Heater Insulation Blanket L8914001 12
Heater Cover L8903301 13
Viton Centering ring for ISO inlet flange, 400K
15
Centering ring for ISO foreline flange ISO-63K
IC063SV
16
O-Ring Kit includes: K0377189
1 inlet flange O-ring, Butyl No. 2-385
F0430001 15
1 foreline flange O-ring, Butyl No. 2-338
660893338
16
10 Viton fill and drain O-rings (Old style), Viton No. 2-112
5.1
10 Viton fill and drain O-rings (new style, Parker No. 2-113
5.1
1 Sight glass O-ring, Parker No. 2-226
5.1
1 PTFE gasket
5.1
Included with the pump:
5.1
1 inlet flange O-ring, Butyl No. 2-385
F0430001 5.1
1 Butyl foreline flange O-ring, Butyl No. 2-338
660893338
5.1
13/8 Hose 1/8 Pipe Barbed Connectors
264301102
5.1
5.1
DC-702 diffusion pump fluid, 500 cc (2 required) 695472005
DC-704 diffusion pump fluid, 500 cc (2 required) 695474005
DC-705 diffusion pump fluid, 500 cc (2 required) 695475005
Installation and Operation Manual 699901021
