These Agilent Varian TwisTorr 84 FS turbomolecular vacuum pumps have a KF-40 inlet flange, with 49 L/S pumping speed. The 84 FS turbo pumps are a supercharged version of the 74 FS, its 1350 Hz overclocked drive frequency allows for a 10% boost in pumping speed, making it a specialized pump for the ultra-high vacuum (UHV). For most general high vacuum (HV) applications, Ideal Vacuum recommends the more economic-dependable 74 FS turbo pump models. These amped-up Agilent 84 FS turbo pumps create a higher compression ratio for light gases, such as Hydrogen and Helium, to deliver an elevated throughput and reach the lowest ultimate pressure. These Agilent Varian 84 FS turbomolecular high-vacuum pumps have a KF-40 inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake KF centering ring), and have an Agilent Varian part number X3502-64001. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 3.75x10-10 Torr when used correctly. These TwisTorr 84-FS turbo pumps require a cooling kit, either fan forced-air or water cooling, along with an outboard remote rack-mount or onboard pump-side-mounted controller, all are sold separately by Ideal Vacuum.

These Agilent Varian TwisTorr 84 FS turbomolecular vacuum pumps have a Conflat CF 2.75 inlet flange, with 56 L/S pumping speed. The 84 FS turbo pumps are a supercharged version of the 74 FS, its 1350 Hz overclocked drive frequency allows for a 10% boost in pumping speed, making it a specialized pump for the ultra-high vacuum (UHV). For most general high vacuum (HV) applications, Ideal Vacuum recommends the more economic-dependable 74 FS turbo pump models. These amped-up Agilent 84 FS turbo pumps create a higher compression ratio for light gases, such as Hydrogen and Helium, to deliver an elevated throughput and reach the lowest ultimate pressure. The Agilent Varian TwisTorr 84 FS turbo pumps, with conflat intake, are true ultra-high vacuum (UHV) pumps having an ultimate pressure as low as 3.75x10-10 Torr when used correctly, for example, the Conflat versions of these pumps allow the intake flange to be baked up to 120 degrees Celsius. These TwisTorr 84-FS turbo pumps require a cooling kit, either fan forced-air or water cooling, along with an outboard remote rack-mount or onboard pump-side-mounted controller, all are sold separately by Ideal Vacuum.

These Agilent Varian TwisTorr 84 FS turbomolecular vacuum pumps have an ISO 63 inlet flange, with 67 L/S pumping speed. The 84 FS turbo pumps are a supercharged version of the 74 FS, its 1350 Hz overclocked drive frequency allows for a 10% boost in pumping speed, making it a specialized pump for the ultra-high vacuum (UHV). For most general high vacuum (HV) applications, Ideal Vacuum recommends the more economic-dependable 74 FS turbo pump models. These amped-up Agilent 84 FS turbo pumps create a higher compression ratio for light gases, such as Hydrogen and Helium, to deliver an elevated throughput and reach the lowest ultimate pressure. These Agilent Varian 84 FS turbomolecular high-vacuum pumps have an ISO-63K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number X3502-64000. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 3.75x10-10 Torr when used correctly. These TwisTorr 84-FS turbo pumps require a cooling kit, either fan forced-air or water cooling, along with an outboard remote rack-mount or onboard pump-side-mounted controller, all are sold separately by Ideal Vacuum.

These Agilent Varian TwisTorr 84 FS turbomolecular vacuum pumps have a Conflat CF 4.5 inlet flange, with 67 L/S pumping speed. The 84 FS turbo pumps are a supercharged version of the 74 FS, its 1350 Hz overclocked drive frequency allows for a 10% boost in pumping speed, making it a specialized pump for the ultra-high vacuum (UHV). For most general high vacuum (HV) applications, Ideal Vacuum recommends the more economic-dependable 74 FS turbo pump models. These amped-up Agilent 84 FS turbo pumps create a higher compression ratio for light gases, such as Hydrogen and Helium, to deliver an elevated throughput and reach the lowest ultimate pressure. The Agilent Varian TwisTorr 84 FS turbo pumps, with conflat intake, are true ultra-high vacuum (UHV) pumps having an ultimate pressure as low as 3.75x10-10 Torr when used correctly, for example, the Conflat versions of these pumps allow the intake flange to be baked up to 120 degrees Celsius. These TwisTorr 84-FS turbo pumps require a cooling kit, either fan forced-air or water cooling, along with an outboard remote rack-mount or onboard pump-side-mounted controller, all are sold separately by Ideal Vacuum.

These TwisTorr 84 FS AG rack mount controllers are a microprocessor controlled frequency converter with new enhanced features that allow greater control and communication capabilities. They are a compact 1/4 rack unit designed for full worldwide compatibility 100-240 VAC. This controller has RS 232/485 connections, powers a cooling fan, drives vent valve controls, provides and acquires the pressure of the Agilent wide range gauges and controls the pump operation parameters for the TwisTorr 84 FS series turbo pumps. It also contains self diagnostic and protection features. This controller automatically recognizes the Agilent active gauges measuring down to 10-3 to 10-9 Torr.

Drives the pumps of the TwisTorr 84 FS Family.Powers the pump cooling fan.Drives the vent valveProvides and acquires the pressure of the wide range gauges.Remote I/O compatible with the previous verson.Navigator default serial compatible RS 232 and 485 interfaceAble to operate with Active Gauges See chart below: This 84FS AG Navigator Controller supports the following Agilent Active Pressure Gauges: FRG 700/702, FRG 720/730 IM 500, IMG 500 PVG 500/502 PCG 750/752 CDG 500 T1000, CDG 500 T0100 CDG 500 T0010, CDG 500 T0001 These Varian Agilent TwisTorr 84 FS Navigator controllers are driven by a single chip microcomputer and consist of two PCBs which include power supply and 3-phase output, analog and I/O section, microprocessor and digital section. The power supply, together with the 3-phase output converts the single phase AC mains supply or 24Vdc supply into a 3-phase low voltage, medium frequency output which is required to power the pump. These controllers have a serial port RS-232/485 which allows the pump to be interfaced with the system controls and to be operated via PC with T-Plus Software.

Drives the pumps of the TwisTorr 84 FS Family.Powers the pump cooling fan.Drives the vent valveProvides and acquires the pressure of the wide range gauges.Remote I/O compatible with the previous verson.Navigator default serial compatible RS 232 and 485 interfaceAble to operate with Active Gauges See chart below: This 84FS AG Navigator Controller supports the following Agilent Active Pressure Gauges: FRG 700/702, FRG 720/730 IM 500, IMG 500 PVG 500/502 PCG 750/752 CDG 500 T1000, CDG 500 T0100 CDG 500 T0010, CDG 500 T0001 These Varian Agilent TwisTorr 84 FS Navigator controllers are driven by a single chip microcomputer and consist of two PCBs which include power supply and 3-phase output, analog and I/O section, microprocessor and digital section. The power supply, together with the 3-phase output converts the 24 VDC supply into a 3-phase low voltage, medium frequency output which is required to power the pump. These controllers have a serial port RS-232/485 which allows the pump to be interfaced with the system controls and to be operated via PC with T-Plus Software.

The Agilent Varian TwisTorr 84 FS PCB 24 VDC Vacuum Pump Controller is a solid state frequency converter that is driven by a chip microcomputer and is composed of a PCB that includes all the circuitry necessary for its operation. This controller uses 24 volt DC to operate. The microcomputer generates the variable output voltage according to the software and the gas load condition of the pump. The Agilent Varian Turbo TwisTorr PCB 24 VDC Vacuum Pump Controller manages signals from sensors I/O connection information, and gives output for a fully automatic operation. These controllers can be remotely operated via remote signals using Varian T-Plus software (RS-232) Sold seperatly on this website. For complete specifications, controller functions, and instruction manual, please see the avaliable PDF download below.

These Turbo Pump-to-Controller cables connect to the Agilent Varian TV81 PCB turbo pump controller. The TV81 PCB controller is ideal for OEM and system integration application. The TV81 PCB operates on 24 VDC and has a very small foot print to be mounted in tight space saving locations. The TV81 PCB controller is sold separately on this website. This price is for the turbo pump cable only.

This Agilent turbomolecular vacuum pump AC main power cable has a NEMA 5-15 plug wall outlet connection and works with most Agilent turbo pump controllers. It is 3 meters long, has Agilent Varian part number 9699958, and works with the following turbo pump models:TwisTorr 74 FSTwisTorr 84 FSTwisTorr 305 FSTwisTorr 404 FSTwisTorr 704 FSTwisTorr 804 FSTurbo-V 1001

The Agilent A-Plus software, formerly T-Plus turbo pump control software, and the LabVIEW driver pack can now be downloaded for free from Ideal Vacuum (see free download links below). The downloads include both 32 and 64 bit versions. This listing is for the sale of the Agilent OEM 3 meter long, DB9, male-to-female serial cable that is needed to connect the turbo or turbo system to a PC when using the A-Plus software. Agilent Technologies A-Plus software is a user friendly communication, control, and monitoring application for Agilent Varian turbomolecular pumps and all the other Agilent products that use the Agilent Windows serial protocol. A-Plus software can simultaneously control and drive one or more turbo pumps connected to a PC through an RS232 or an RS485 serial communication port. If the PC has no serial port, a serial to USB cable is available (part number P104165).

This 3 foot long RS232 to USB adapter cable allows the Agilent Varian T-plus turbo pumps to be controlled from a remote computer that has a USB port, but no serial port. T-Plus software requires a serial connection. For PC's that do not have an RS232 or RS485 serial comm port but only a USB 2 connection port, this cable allows you to connect a T-plus turbo pump to a USB 2 port and have the same T-Plus software functions as if you had a serial comm port on your PC.

These Agilent Varian inlet screens are designed to protect the TwisTorr 74 FS and 84 FS turbo molecular vacuum pumps with KF-40 (NW-40) intake flanges. These turbo intake splitter sheilds help protect the pump from foreign objects, they are made of stainless steel, and have Agilent Varian part number is 969-9309. Inlet Screen fits most compact turbo pumps with KF-40 inlet flange, including Agilent Varian models:TwisTorr 74 FSTwisTorr 84 FS

These Agilent Varian inlet screens are designed to protect the TwisTorr 74 FS and 84 FS turbo molecular vacuum pumps with Conflat CF 2.75 Inch intake flanges. These turbo intake splitter sheilds help protect the pump from foreign objects, they are made of stainless steel, and have Agilent Varian part number is 969-9328. Inlet Screen fits most compact turbo pumps with Conflat CF 2.75 Inch inlet flange, including Agilent Varian models:TwisTorr 74 FSTwisTorr 84 FS

These Agilent Varian inlet screens are designed to protect the TwisTorr 74 FS and 84 FS turbo molecular vacuum pumps with ISO-63 (LF-63) intake flanges. These turbo intake splitter sheilds help protect the pump from foreign objects, they are made of stainless steel, and have Agilent Varian part number is 969-9309. Inlet Screen fits most compact turbo pumps with ISO-63 inlet flange, including Agilent Varian models:TwisTorr 74 FSTwisTorr 84 FS

These Agilent Varian inlet screens are designed to protect the TwisTorr 74 FS and 84 FS turbo molecular vacuum pumps with Conflat CF 4.5 Inch intake flanges. These turbo intake splitter sheilds help protect the pump from foreign objects, they are made of stainless steel, and have Agilent Varian part number is X3502-68000. Inlet Screen fits most compact turbo pumps with Conflat CF 4.5 Inch inlet flange, including Agilent Varian models:TwisTorr 74 FSTwisTorr 84 FS

These Agilent Varian TwissTorr turbo pump water cooling kits are metal with plastic water line connections. They are designed to mount to the bottom of the Agilent TwissTorr turbomolecur vacuum pumps. A water cooling kit is used under heavy load conditions or when air cooling is insufficient. The assembled kit must be screwed into the suitable holes of the pump body with a recommended closing torque of 5 Nm (3.69 ft/lb). Cooling may be carried out either through an open circuit with eventual discharge of the water, or using a closed circuit cooling system. The water temperature must be between +15 °C and +25 °C, with an inlet pressure between 2 and 4 bar. This allows a flow higher than 65 l/h.

These Agilent Varian TwissTorr turbo pump water cooling kits are metal with plastic water line connections. They are designed to mount to the bottom of the Agilent TwissTorr turbomolecur vacuum pumps. A water cooling kit is used under heavy load conditions or when air cooling is insufficient. The assembled kit must be screwed into the suitable holes of the pump body with a recommended closing torque of 5 Nm (3.69 ft/lb). Cooling may be carried out either through an open circuit with eventual discharge of the water, or using a closed circuit cooling system. The water temperature must be between +15 °C and +25 °C, with an inlet pressure between 2 and 4 bar. This allows a flow higher than 65 l/h.

These Ideal Vacuum radial air fan cooling kits fit all Agilent Varian Twistorr 74FS, 84FS, and Turbo-V 81 turbomolecular vacuum pumps, and provide air flow perpendicular to the pump. These kits are a direct replacement for Agilent Varian part number: 9699290. The fan is mounted to an L-shaped bracket which mounts to the bottom of the pump with eight included M3 screws. The fan can be conveniently oriented in multiple positions. The fan has a 50 cm cable with a USB-B male connector which connects to and is powered by the on-board or rack mounted turbo controller. A 5-meter fan extension cable, PN: P1011992, sold separately, is needed for use with rack mounted controllers.

This Ideal Vacuum air cooling fan extension cable is used to connect a turbo pump’s air cooling fan to a remote rack mounted controller. It directly replaces Agilent Varian part number 9699940. It can be used with Agilent Varian TwisTorr 74FS, 84FS, 304FS, 305FS, Turbo-V 81, and V301 turbo pumps. This cable is 5 meters long and has a male USB-B on one end and a female USB-B on the other. The fan’s power cable plugs into one end of the cable. The other end plugs into the J6 female USB-B connector on the back of the rack mount controller.

These Agilent Varian turbo pump vent valve kits have 0.5 mm orifice, are normally open (N.O.), and are closed when the turbo controller is powered on. In the event that power is lost this vent valve will open and start introducing air into the turbo at a rate that will bring it to a safe stop. This helps extend the life of the turbo by limiting the amount of time it spends while passing through resonant frequecies, which are hard on the pump's bearings (you can hear the pump actually get louder when it passes through these resonances). Venting after power loss is also important to prevent backstreaming from the backing pump, if vacuum is left on the turbo after power failure oils or debrises from the backing pump could be sucked back into the turbo pump. We recommend a vent valve and or a roughing line normally closed (N.C.) isolation valve to protect the turbo during power failure. This kit includes the hardware needed to mount to the side of a the Agilent Varian turbo pump. It is designed to plug into the Agilent Varian rack mount turbo pump controller, see J7 in center photograph, and have Agilent Varian Part Number 9699844. We also sell a vent valve extension cable 5 meters, Agilent Varian part number 9699941. Please see the available instruction manuals in our PDF download section Below.

These Agilent Varian vent valve extension cable are used to extend the distance between the vent valve and the turbo controller, length is 5 meters long, and it plugs into J7 on the back side of the rack mount controller (see center photograph). This vent valve extension cable has Agilent Varain part number 9699941 and is often used with our vent valve Agilent Varian part number PN 9699844. Please see the available instruction manuals in our Downloads section below. Works with the following turbo pump models: TwisTorr 74 FSTwisTorr 84 FSTwisTorr 305 FS

This Agilent Varian Manual Hand Operated Vent Valve device for Turbomolecular Vacuum Pumps has a Viton O-ring included. Its has knurled surface for easy turn. The vent valve and vent device allow to avoid undesired venting of the pump. Agilent Varian Part Number X3502-68005. Fits most Agilent Varian turbo pumps, including models:TwisTorr 74 FSTwisTorr 84 FS

These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, has 7/16 and 1/4 Swagelok gas supply fittings, and are designed to insert into the purge gas supply line of most medium sized turbomolecular vacuum pumps. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is

Agilent Varian Part Number PN: 9699240. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, a 1/4 Swagelok gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is

These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, a KF-16 gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is

These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, a 1/4 Swagelok gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is

These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, has 7/16 and 1/4 Swagelok gas supply fittings, and are designed to insert into the purge gas supply line of most medium sized turbomolecular vacuum pumps. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is

These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, has 7/16 and 1/4 Swagelok gas supply fittings, and are designed to insert into the purge gas supply line of most medium sized turbomolecular vacuum pumps. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is

Fitting Size NW KF-16 This is an extended length exhaust outlet for Agilent Twisttorr 84 FS turbomolecular pumps. The extended length provides extra clearance, easing access to rouging pump connections. The outlet connection is NW KF-16. Agilent Twisttorr 84 FS Extended Length exhaust outlet.Outlet Length:Outlet Connection: NW KF-16