The MKS GM50A Mass Flow Controller is capable of being configured to control N2 or equivalent, having a Full-Scale Flow Range of 20 sccm and a control range of 0.4 to 20 sccm. It has a 15-pin D-subminiature analog connector with tied grounds, a 0-5 VDC flow input/output signal and a Swagelok® 4 VCR® male input and output fittings. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 50 sccm and a control range of 1 to 50 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 100 sccm and a control range of 2 to 100 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 200 sccm and a control range of 4 to 200 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR®. It has a Full Scale Flow Range of 500 sccm and a control range of 10 to 500 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Digital calibration yields 1% of set point accuracy on the calibration gas. Typical response times are on the order of 500 milliseconds. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 1000 sccm and a control range of 20 to 1000 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. This is a raw unit without cards. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables and optional cards for the MKS 946 are available on this website.

The MKS Control Card Mass Flow Controller is compatible with the 946 and dual Mass Flow controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

The MKS Mass Flow Controller Cable connects 179, 1179, 1462, 1479, 1559, 2179, GE50A, GM50A, IE50A, IM50A, IM250A, P250A mass flow controllers to 946 controllers with 15-pin type D High-density subminiature to 15-pin standard subminiature connectors. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.

The MKS Mass Flow Controller Cable connects 179, 1179, 1462, 1479, 1559, 2179, GE50A, GM50A, IE50A, IM50A, IM250A, P250A mass flow controllers to 946 controllers with 15-pin type D High-density subminiature to 15-pin standard subminiature connectors. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.