MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Range of 4 to 200 sccm, RS - 485 Serial Communication Protocol, 4 VCR Male.
MKS Part Number: GM50A004202R5M020.
The MKS GM50A Mass Flow Controller is configured to control Ar or equivalent, having a Full-Scale Flow Range of 200 sccm and a control range of 4 to 200 sccm. This 200sccm Argon unit can be "downranged" to 141sccm through the software, bringing the controllable range from 4-200sccm to ~2.8-141sccm Argon.
It has a RS - 485 serial communication port, a 0-5 VDC or or 4 to 20 mA flow input/output signal and a Swagelok® 4 VCR® male input and output fittings. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.
Swagelok, VCR-TM Swagelok Company
