MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Range of 1 to 50 sccm, RS - 485 Serial Communication Protocol, 4 VCR Male.
MKS Part Number: GM50A013501R5M020.
The MKS GM50A Mass Flow Controller is configured to control N2 or equivalent, having a Full-Scale Flow Range of 50 sccm and a control range of 1 to 50 sccm. It has a RS - 485 serial communication port, a 0-5 VDC or or 4 to 20 mA flow input/output signal and a Swagelok® 4 VCR® male input and output fittings. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.
Swagelok, VCR-TM Swagelok Company
