MKS 1179C Mass Flow Electronic Absolute Pressure Controller, 50 sccm N2 Equivalent, 15 Pin, Swagelok 4 VCR.
MKS Instruments Part Number: 1179C00151CR1BV.
The MKS 1179C is an all-metal mass flow controller designed to measure the flow of gases in a wide variety of applications. Input and output connections are Swagelok® 4 VCR® The MKS 1179C mass flow controllers are available with full scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm.The 1179C is a direct form-fit-function replacement for the most common mass flow meters on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 1179C is compatible with mass flow controller power supply and display electronics from MKS or other manufacturers.
Swagelok, VCR-TM Swagelok Company