Inficon Inc. Quartz Monitor Crystals.6Mhz Alloy Crystal Sensor, Flat Pack Dispenser, 10/Pack. Part Number 750-1002-G10
Inficon Inc.
INFICON 6 MHz crystals are used with all INFICON controllers and monitors. The 6 MHz crystals are available in gold, silver, or alloy electrodes and come in a variety of packages depending on your needs.
The INFICON clean room quartz crystal package enables convenient dispensing of the crystals directly from the package to the sensor, minimizing operator handling and risk of contamination. To make the crystal package more cleanroom-friendly, we eliminated the paper and foam inserts and made the packages stackable for easy storage.
Features
- Frequency: 6 MHz
- Diameter: 14 mm (0.550 inch)
- Front full pad
- Double anchor back electrode pattern
- Gold - recommended for general purpose, for processes with high heat loads,low film stress deposition e.g Au, Al, Ag
- Silver - recommended for processes with high heat loads, high-stress films e.g SiO2, Si3N4, W, Ta, Cr, Ni, AlN, TiN, ZnO, GaN, Mo, DLC
- Alloy - for optimizing optical/dielectric coatings e.g MgF2, SiO, TiO, HfO2 and other high stress applications
Note that:
The specific stress characteristics of these films can vary depending on the deposition method (e.g., sputtering, chemical vapor deposition, or atomic layer deposition) and the processing conditions.
Controlling and understanding thin film stress is crucial for ensuring the reliability and performance of devices that incorporate these materials.
Inficon Quartz Monitor Crystal Data Sheet.pdf
