Keyword Ideal Spectroscopy Part Number Manufacturer Part Number
The MKS Granville-Phillips 355 Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precision indication of vacuum chamber differential pressure from ambient. The unique sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. This small module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space. The full range pressure measurement is output signal with DeviceNet digital interface. This is a DeviceNet version having setpoints that can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.
Condition: New
Product Number: P1012041
Price: $2,239.02