Edwards iGX100M Dry Vacuum Pump, 62 CFM 200-230V 50/60Hz, 3.75 mtorr. Ultimate Pressure
Edwards Part Number A54612958
The Edwards iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote. For more specs and options scroll down to AVAILABLE DOWNLOADS and download datasheet.pdf. These Edwards iGX100M dry semiconductor vacuum pump are new and have Edwards part number A546-12-958 (A54612958).
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Ordering/Models for the iGX Series:
iGX100L 200 - 230V 50/60Hz A54610958
iGX100L 380 - 460V 50/60Hz A54610959
iGX100N 200 - 230V 50/60Hz A54611958
iGX100N 380 - 460V 50/60Hz A54611959
iGX100M 200 - 230V 50/60Hz A54612958
iGX100M 380 - 460V 50/60Hz A54612959
iGX600L 200 - 230V 50/60Hz A54630958
iGX600L 380 - 460V 50/60Hz A54630959
iGX600N 200 - 230V 50/60Hz A54631958
iGX600N 380 - 460V 50/60Hz A54631959
iGX1000M 200 - 230V 50/60Hz A54632958
iGX1000M 380 - 460V 50/60Hz A54632959
iGX1000N 200 - 230V 50/60Hz A54681958
iGX1000N 380 - 460V 50/60Hz A54681959
iGX100MTI 200 - 230V 50/60Hz A54648958
TECHNOLOGY:
Lower Utilities Costs. Typically a 40% saving can be made on utilities costs over an entire fab. Based on a 300mm fab in the US, containing 200 tools, 537 pumps 70% GX pumps, 30% iH pumps
iGX fitted with constant flow water valve
Designed for Energy Efficiency
High performance motors and inverter drives
Low operating power consumption
Lower power standby mode using Active Utility Control (AUC)
Nitrogen dilution can be tuned to the application requirement
Minimizes gas usage
Highly efficient cooling
High conductivity materials and good design enables low water flow
Precision ceramic bearings
Very high load capability for reliability
Low noise and vibration
Ethernet Connectivity
The GX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as:
