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Keyword       Ideal Spectroscopy Part Number       Manufacturer Part Number

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Condition:
  New
Part Number:
  P1012636
Warranty:
  Full Manufacturer's Warranty

Available Now: 
1  



$21,407.80


Print Version

Ebara ESR20N S2 Multistage Dry Vacuum Pump, 45 to 70 CFM, Clean to Medium Duty Processes, Water Cooled, 3-Phase, 200-220V, 60Hz. PN: 202093


Ebara ESR20N S2 Multistage Dry Vacuum Pump, Pumping Speed 45 to 70 CFM (1300 - 2000 l/m), KF-40, Clean to Medium Duty Processes, Water Cooled, 3-Phase, 200-220V, 60Hz.
Ebara Part Number: 202093.

The Ebara ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The Ebara ESR Series covers a wide pumping speed range from 45 to 706 CFM with an ultimate pressure as low as 1.5 mTorr. This listing is for the sale of the Ebara ESR20N S2 Multistage Dry Vacuum Pump, Clean to Medium Duty Processes, Water Cooled, 200-220V / 3Ph, Ebara Part Number: 202093.

    Applications

  • Sputtering
  • PVD
  • Load Lock and Transfer
  • Ashing
  • Ion Implanter
  • Etch
  • Clean Gases and Processes

    Benefits and Features of the Ebara EV-A series dry rotary lobe pumps.

  • Low Cost of Ownership [Power, S2, Water, Footprint, Volume, Weight]
  • No Nitrogen purge required for ESR20N in clean applications
  • Variable pumping speed to match application requirements
  • High performance brushless DC motors
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked




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PDF Logo Ebara ESR Series Dry Vacuum Pump Specifications Datasheet.pdf



You may wish to consider the following products:

Ideal Vacuum Logo Water Mark
CONTACT US
Ideal Spectroscopy
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealspectroscopy.com



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