Agilent Varian TwisTorr 84 FS Turbo Pump Package Deal with ISO-K 63 Inlet and IDP-3 Dry Scroll Backing Pump, 84FS AG Remote Controller, and Air-Cooling Kit.
Agilent Varian TwisTorr 84 FS Turbo Pump Package Deal with ISO-K 63 Inlet and IDP-3 Dry Scroll Backing Pump, 84FS AG Remote Controller, and Air-Cooling Kit.
This Agilent TwisTorr 84-FS turbo vacuum pump package deal with dry scroll roughing pump is ideal for laboratory applications. The package deal includes an Agilent Varian TwistTorr 84-FS turbo pump with ISO-K 63 inlet flange, with a pumping speed of 67 l/s, KF-16 foreline flange, and an inlet screen. This 84 FS turbo pump has a start-up time of less than 2 minutes, has a maximum rotational speed of 81,000 rpm, and has Agilent part number X3502-64000. This package deal includes an IPD-3 dry scroll backing pump and a 120V mains power cable (NEMA 5-15P plug). The IDP-3 has a peak pumping speed of 2.1cfm (3.6 m3/h) at 60 Hz, produces an ultimate pressure of 250 mTorr, and is extremely quiet (< 55 dBA). This deal also includes the TwisTorr 84FS AG remote controller with 120V mains power cable (NEMA 5-15P plug). The controller has an attached 5 m long cable which connects to and powers the pump. The controller has RS232/485 serial communication, and dedicated 24 VDC outputs for powering an air-cooling fan, vent valve, and pressure gauge. The controller can be rack or benchtop mounted. This package deal also includes a radially-mounted, forced air-cooling kit with 5 m long extension cable for connection to the controller. A water-cooled version is available upon request. This turbo pump package deal includes the roughing pump, but does not include roughing lines, vacuum chamber, pressure measurement gauges, or vent valves, all of which are available and sold separately by Ideal Vacuum. This package deal is stored in our inventory as a kit, made up of many separate parts, and each is listed in our Availability of Kit Components section below.
These Agilent Varian TwisTorr 84-FS turbomolecular high-vacuum pumps have new and improved performance, including a newer designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System reduces noise, vibration, and ensures optimal bearing operating conditions to extend life, minimize system downtime, and assure stable pumping performance over long periods. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. Agilent turbo pumps are designed for optimum performance in real world applications where their compact size meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 84 FS turbo pumps require minimal to no maintenance.
Applications for this package deal include:
Mass Spectrometry
Gas Chromatography Mass Spectrometry (GC/MS)
Liquid Chromatography Mass Spectrometry (LC/MS)
Inductively Coupled Plasma Mass Spectrometry (ICP-MS)
Time-of-Flight Mass Spectrometry (TOF)
Vacuum in Research and Development:
High Energy Physics
Fusion Technology
General UHV Research
Synchrotron Light Sources Particle Accelerators
Nanotechnology Instruments:
Electron Microscopy
Scanning Electron Microscopy (SEM)
Transmission Electron Microscopy (TEM)
Focused Ion-beam Systems (FIB)
Surface Analysis
Semiconductor Manufacturing
Industrial Vacuum Processing:
Thin Film Deposition:
Glass coating equipment (architectural and automotive glass, flat panel displays)
Thin film solar cells production (photo-voltaic)
Optical data media (CD, DVD, Magneto Optical Discs)
