Home > Vacuum Pumps > Diffusion Vacuum Pumps > AX 65 Diffusion Pumps > Agilent Varian Overtemp 365ºF Thermal Switch for AX-65 Diffusion Pump Heater Harnesses, L9964001

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Agilent Varian Overtemp 365ºF Thermal Switch for AX-65 Diffusion Pump Heater Harnesses, L9964001

Agilent Varian Replacement Over Temperature 365ºF Thermal Switch for AX-65 Diffusion Pump Heater Harnesses
Agilent Varian Part Number L9964001
This is a 365ºF replacement thermal switch for the following AX-65 diffusion pump heater harnesses:

200W, 115 VAC heater harness, PN L9994307
250W, 115 VAC heater harness, PN L9994303
200W, 220 VAC heater harness, PN L9994308
250W, 220 VAC heater harness, PN L9994304
250W, 165 VAC heater harness, PN L9994302
250W, 90 VAC heater harness, PN L9994301

This is a replacement over temperature thermal switch. A normally-closed, over temperature thermal switch has been attached to the diffusion pump body via the heater harness on the side of the pump. Loss of cooling, high temperatures, high pressure, or low fluid level causes the contacts of the thermal switch to open. When the problem has been corrected, the thermal switch automatically resets to closed. The switch is set to open at 365ºF. See #6 on (diagram exploded view & parts) illustration below for location.

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Specifications
Specification	Units	AX-65 with cold cap	AX-65 with baffle
Operating Range	Torr mbar	3x10⁻³ to < 5x10⁻⁸ 3.9x10⁻³ to < 6.5x10⁻⁸	8.0x10⁻³ to < 5x10⁻⁸ 10.4x10⁻³ to < 6.5x10⁻³
Pumping Speed, Maximum	l/s, Air l/s, Helium	65 90	30 65
Throughput (Air), Max. Optimum Range Overload Range (@ 1x10⁻² Torr)	Torr-l/s mbar-l/s Torr-l/s mbar-l/s	0.19 0.25 0.30 0.40
Forepressure, Max. No Load Full Load	Torr mbar Torr mbar	0.75 1.00 0.60 0.78
Compression Ratio	Air He	4x10⁻⁷ 4x10⁻⁶
Backstreaming Rate at Pump Inlet	mg/cm²	< 2x10⁻⁴	< 2x10⁻⁵
Electrical Power VAC, 50/60 Hz 1 Phase	Watts	200/250
Warmup Time	minutes	7
Cooldown Time	minutes	10
Fluid Charge	cc	30
Recommended backing pump capacity	cfm (m³/hr)	≥ 1.5 (2.5)
Cooling Fan	cfm	30
Inlet Flange	N/A	NW50 or ISO-63-K
Body	N/A	Stainless steel
Jet Assembly	N/A	Three-stage, self-aligning, aluminum, w/ aluminum cold cap
Net Weight	lbs (kg)	8 (3.63)

AX-65 Diffusion Pump Replacement Parts List

Description	Part No.	Item
Jet Assembly	L9674301	1
Cold Cap	L9675301	2
Inlet Baffle	L9706001	3
Inlet Baffle Retrofit Kit	R1160065	3
Jet Alignment Kit	L9995301	4
Heaters (one heater required per pump)		5
90 V / 250 watt Heater Harness	L9994301	5.1
115 V / 250 watt Heater Harness	L9994303	5.2
165 V / 250 watt Heater Harness	L9994302	5.3
220 V / 250 watt Heater Harness	L9994304	5.4
115 V / 250 watt Heater Harness	L9994307	5.5
220 V / 250 watt Heater Harness	L9994308	5.6
Normally Closed Thermal Switch (set to open at 365°)	L9964001	6
Optional Normally Open Switch (set to close at 170°)	L9964002	7
Fan	661300138	8
Foreline Baffle	L9676301	9
Inlet Centering Ring Assembly, NW50 with Viton O-ring	L9680301	10
Foreline Centering Ring Assembly, NW16 with Viton O-ring	KC16AV	11
Bottom Insulation	L9701002	12
Santovac 5 diffusion pump fluid, 40 cc	695405001	13

Agilent Varian AX-65 Diffusion Pump Manual.PDF

Agilent Diffusion Pumps Catalog.pdf

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