Home > Vacuum Pumps > Diffusion Vacuum Pumps > AX 65 Diffusion Pumps > Agilent Varian Optional 170ºF Pump Ready Thermal Switch for AX-65 Diffusion Pump, L9964002

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P106754

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Agilent Varian Optional 170ºF Pump Ready Thermal Switch for AX-65 Diffusion Pump, L9964002

Agilent Varian Optional Pump Ready 170ºF Thermal Switch for AX-65 Diffusion Pump.
Agilent Varian Part Number L9964002

This is a (Optional) Pump Ready thermal switch. This thermal Pump Ready switch, is to be attached to the side plate of the AX-65 Pump next to the over temperature thermal switch. This optional thermal switch can be connected to a light to show when the pump is at operating temperature. It is normally open and closes when the pump reaches operating temperature. The switch is set to close at 170ºF (operating temperature). See graphic for installation/location on the pump.

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Specifications
Specification	Units	AX-65 with cold cap	AX-65 with baffle
Operating Range	Torr mbar	3x10⁻³ to < 5x10⁻⁸ 3.9x10⁻³ to < 6.5x10⁻⁸	8.0x10⁻³ to < 5x10⁻⁸ 10.4x10⁻³ to < 6.5x10⁻³
Pumping Speed, Maximum	l/s, Air l/s, Helium	65 90	30 65
Throughput (Air), Max. Optimum Range Overload Range (@ 1x10⁻² Torr)	Torr-l/s mbar-l/s Torr-l/s mbar-l/s	0.19 0.25 0.30 0.40
Forepressure, Max. No Load Full Load	Torr mbar Torr mbar	0.75 1.00 0.60 0.78
Compression Ratio	Air He	4x10⁻⁷ 4x10⁻⁶
Backstreaming Rate at Pump Inlet	mg/cm²	< 2x10⁻⁴	< 2x10⁻⁵
Electrical Power VAC, 50/60 Hz 1 Phase	Watts	200/250
Warmup Time	minutes	7
Cooldown Time	minutes	10
Fluid Charge	cc	30
Recommended backing pump capacity	cfm (m³/hr)	≥ 1.5 (2.5)
Cooling Fan	cfm	30
Inlet Flange	N/A	NW50 or ISO-63-K
Body	N/A	Stainless steel
Jet Assembly	N/A	Three-stage, self-aligning, aluminum, w/ aluminum cold cap
Net Weight	lbs (kg)	8 (3.63)

AX-65 Diffusion Pump Replacement Parts List

Description	Part No.	Item
Jet Assembly	L9674301	1
Cold Cap	L9675301	2
Inlet Baffle	L9706001	3
Inlet Baffle Retrofit Kit	R1160065	3
Jet Alignment Kit	L9995301	4
Heaters (one heater required per pump)		5
90 V / 250 watt Heater Harness	L9994301	5.1
115 V / 250 watt Heater Harness	L9994303	5.2
165 V / 250 watt Heater Harness	L9994302	5.3
220 V / 250 watt Heater Harness	L9994304	5.4
115 V / 250 watt Heater Harness	L9994307	5.5
220 V / 250 watt Heater Harness	L9994308	5.6
Normally Closed Thermal Switch (set to open at 365°)	L9964001	6
Optional Normally Open Switch (set to close at 170°)	L9964002	7
Fan	661300138	8
Foreline Baffle	L9676301	9
Inlet Centering Ring Assembly, NW50 with Viton O-ring	L9680301	10
Foreline Centering Ring Assembly, NW16 with Viton O-ring	KC16AV	11
Bottom Insulation	L9701002	12
Santovac 5 diffusion pump fluid, 40 cc	695405001	13

Agilent Varian AX-65 Diffusion Pump Manual.PDF

Agilent Diffusion Pumps Catalog.pdf

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