Agilent Varian IDP-3 Dry Oil-Free Scroll Vacuum Pump With Inlet Valve Kit PN IDP3B21, 115 VAC 50/60 Hz
The Varian IDP-3 dry scroll vacuum pumps is a compact, high
performance dry pump that provides
affordable oil-free vacuum and easy
system integration, and is suitable
for a wide variety of applications.
The Varian IDP-3 employs an innovative
hermetic design in which the motor
and bearings are outside the vacuum
space, allowing full isolation of all
pumped gases. Delivering a robust
pumping speed of 60 l/m (2.1 CFM) and a very
low base pressure of less than 2.5x10-1 Torr.
The Varian IDP-3 provides all the
advantages of Varians patented scroll
pump technology in a compact,
lightweight, cost-effective package. This pump is factory installed with an Inlet Valve Kit, for applications where the process is sensitive to pump debris that can be carried back into the pump at turn off. These new Varian IDP-3 dry oil-free scroll vacuum pumps (Product Number IDP3B21) operate on 1 Ph, 115 VAC, 50/60 Hz. An Instruction Manual and Brochure PDF on the IDP3 Scroll Pumps can be downloaded, by scrolling down to (AVAILABLE DOWNLOADS)
APPLICATIONS INCLUDE:
Analytical Instrumentation
GC/MS
Residual gas analyzers
Load locks for mass spectrometers
Electron microscopes
Surface area analyzers
EM Sample prep coaters
Semiconductor Fabrication
Gas panels
Gas delivery systems
Double wall containment vessels
High Energy Physics
Accelerators
Beam lines
Synchrotrons
Industrial processing
Laser evacuation
Cryogenic dewars
Glove boxes
Gas recovery and recirculation
Cryopump roughing
Tube processing
Vacuum chucks.
General Research & Development
Experimental chambers
Sample prep systems
Surface analysis systems
Backing turbo pump on beam lines.
