Edwards nEXT85D turbomolecular high vacuum pumps with an NW40 KF-40 inlet flange have a pumping speed of 61 liters per second (l/s) and an ultimate pressure of 8 x 10^-8 mbar (6 x 10^-8 Torr). This nEXT85D pump has an included inlet screen, and an ISO KF-16 exhaust foreline flange. The nEXT85D series turbo pumps require 24 to 48 VDC input power at a maximum of 120 Watts (normal operation is typically less than 80 Watts). A permanently attached DB15 combination power and control cable is standard on the pump. All nEXT85D turbo pumps have a compact onboard controller with RS232, RS485, & USB interfaces, five status LED's, and an accessory port to control either an air-cooling fan or a solenoid vent valve ( a "Y" connector is available for connecting both a fan and valve). All that is needed is a suitable power supply and start/stop logic. For laboratory use we recommend the Edwards Turbo Instrument Controller (TIC) or the Turbo Active Gauge (TAG) which can both act as a power supply and remote controller for the smaller sized nEXT pumps. We also offer a variety of optional accessories, including the TIC and TAG, forced air and water cooling kits, along with solenoid operated vent valves. This nEXT85D turbo pump has Edwards part number B8G210A01.

Edwards nEXT85D Turbo Pump Specifications:

• Part Number: B8G210A01
• Inlet Flange: NW40 KF-40
• Base Pressure: 8 x 10^-8 mbar (6 x 10^-8 Torr)
• Operating Speed: 90,000 RPM
• Operating Position: From horizontal to vertical (inlet up)
• Pumping Speed: 61 l/s
• Cooling: Forced Air or Water
• Exhaust Flange: KF-16
• Operating Voltage: 24-48 VDC
• Maximum Power: 120 Watts (typical operation < 80 Watts)
• Power and Communication: DB15 serial RS232/RS485 interface, USB
• One accessory port
• Recommended Roughing Pump: nXDS6i

The nEXT turbo pumps have a rotor designed to optimize pump performance while maintaining high levels of reliability. The "D" variant of nEXT turbo pumps have both turbomolecular and drag stages for improved tolerance to higher backing line pressures, and have superior pumping speed and compression across all gas species. In addition to enhanced performance, all nEXT turbo pumps have field serviceable oil cartridges and shaft bearings which dramatically decrease downtime. nEXT D turbo pumps benefit from a compact onboard controller which has drive electronics for controlling pump operation and standby speed, and operating solenoid vent valves (TAV5, TAV6) and air-cooling units (via the 24 VDC accessory port). The integral controller has a DB15 interface for RS232 and RS485 serial communications and for supplying pump power. The USB port allows the use of Edwards nST2 PC software (free download from link below). The controller also has five indicator LED's which signal the general status, operation, and service status of the pump. The optional TIC turbo instrument controller, or TAG turbo and active gauge controller can both power and control the pump.

Edwards nEXT pumps with a CF flange are true ultra-high vacuum (UHV) pumps with an ultimate pressure into the 10^-10 Torr range (if all-metal intake seal gaskets are used and the vacuum chamber is completely cleaned and baked out). Turbo pumps with ISO or KF flanges are limited (by permeation and outgassing of the rubber/elastomer O-ring seals) to an ultimate pressure in the 10^-8 Torr range. The intake of Conflat flanged nEXT85D pumps can be baked up to 120 °C when the turbo is water cooled. Heater bands for the Conflat pumps are sold separately.

For vacuum system integration applications, the nEXT85D pump can be powered by a suitable user supplied 24 to 48 VDC power source. For laboratory applications we recommend the Edwards TIC turbo instrument controller or the TAG turbo & active gauge controller, either of which can both supply power and control the pump. The TIC series of controllers are bench top or rack mountable remote user interface/power sources, which communicate with the Edwards nEXT series pumps through RS232/RS485 and provide full monitoring and control of the turbo pump, and optionally for one or more vacuum gauge instruments. When an Edwards relay box is added, it becomes the control interface between the TIC controller and the mains backing pump, turbo pump flange heater band, and a backing line isolation valve. The TAG turbo and active gauge controller can power nEXT85D turbo pumps and a vacuum gauge, and its large LED display can show pump speed or vacuum pressure.

The pump instruction manual and Edwards nEXT pump product brochures are available in the downloads section.

Typical Turbo Pump Applications include:

• General clean pumping applications
• Scanning Electron Microscopes - SEM
• Beam lines and high energy physics
• Mass Spectrometry
• Electron Microscopy
• Sample Preparation
• Research and Development
• High Energy Physics
• Industrial
• Semiconductor
• Coatings
• Surface Science Instruments