For applications, process, maintenance engineers, and scientists who depend on Cryogenic Compressors in fields such as vacuum coating, semiconductor production, particle accelerators, sputter deposition systems and Molecular Beam Epitaxy. The 9600 Compressor is designed expressly for a long usable life, very reliable, and is very easy to use. The 9600 compressor provides outstanding performance with all Cryo-Torr Cryopumps, On-Board Cryopumps, On-Board Waterpumps, and On-Board TurboPlus Vacuum Pumps.

Edwards CTI Cryo-Torr Cryopump 9600 Helium Compressor It is a lightweight design, with large casters for easy handling, and its power, helium, and water hookups are all easily accessible for fast installation. The 9600 requires no maintenance beyond a recommended adsorber change once every three years. Circuit protection is provided by a single row of breakers which are easily accessible at the rear panel. See manual for adsorber replacement. Remote controls are supported, giving you the flexibility of remote compressor location (but not included). Has extreme high capacity and efficient design for improved pump performance and fast regenerations. This unit is HIGH VOLTAGE, Water Cooled, Three Phase, Input Voltage 380/415V 50Hz, 380/460V 60Hz C series On-Board Power. Has On-Board power outputs to drive standard 1-phase(2-phase) motor On-Board and Cryo-Torr and Cryodyne pumps.
A Users and Configuration Manual is provided by downloading the pdf.

Can be used with the the following Cryo-Pumps

• Cryo-Torr 100, 7, 8, 8F, 10