TPS-flexy: Do-It-Yourself Vacuum! Create your integrated turbo pumping system with Twistorr 84 FS Conflat CF 4.5 inlet, Onboard Controller, and IDP3 Scroll Roughing Pump. These are plug and pump high and ultra high vacuum systems. Compact, reliable, fully integrated vacuum solutions, available as high capacity, with wide pumping speeds ranging down from atmosphere to UHV 1x10-9 Torr. Now with the innovative improved reliability TwisTorr FS Turbomolecular Vacuum Pumps (84FS or 304FS). This Agilent TPS-Flexy is 120VAC but 240VAC models are available. To get your system up and running in no time, follow the easy assembly instructions accompanying your Flexy Kit.

To see a VIDEO on the Flexy Assembly, click the Show More Button below.↯

Applications Include:

• UHV System Pump Down
• ION PUMP Roughing
• Lamp and Tube Processing
• Cryopump Regeneration
• High Vacuum Systems Operation
• High and Ultra High Vacuum Systems Bake Out

This Agilent Varian TPS-Flexy Includes the Following Components:

• Agilent Varian 84 FS TwisTorr Turbomolecular Pump, CF4.5 Inlet, 49 l/s nitrogen, part number X3502-64002
• Agilent Varian 84 Onboard Navigator Controller, PN X3509-64000
• Agilent Varian Air Cooling Fan Kit for Rack&Onboard Controller, PN 9699290
• Agilent Varian IDP3 120V Dry Scroll Roughing Pump, PN IDP3B01
• CF4.5 inlet screen, part number x3502-68000
• AC power cord, 3 meter, part number 9699958

This Agilent Varian TPS-Flexy is a complete self contained vacuum system, just plug in and pump down. All that is required is the hardware and pressure gauges necessary to connect to your chamber or vacuum process.

Notes on the Agilent Varian 84 FS Turbomolecular Vacuum Pump
These Agilent Varian TwisTorr 84 FS turbomolecular high-vacuum pumps have new and amazing improvements over the previous V-81M, V-81T turbo pumps. These improvements include the Twistorr drag stage technology and Agilent Floating Suspension. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over time. The unique bearing and dry lubrication in the Agilent TwisTorr 84 FS eliminate oil and maintenance, and permit operation of the pump in any orientation.

Agilent Varian TwisTorr turbo pumps are designed for optimum performance in real world applications and integrate well into the Agilent TPS-bench vacuum system. These new Agilent TwisTorr 84 FS turbo pumps require minimal to no maintenance and provide protection from misuse. These pumps have the copper water cooling channel which optimizes heat transfer, and reduces water consumption and cost-of-ownership. The Agilent Varian TwistTorr 84 FS turbo pump with CF4.5 Inlet flange, has a pumping speed of 49 l/s of nitrogen, KF-16 foreline flange and ambient operating temperature from 5 °C to +35 °C. These 84 FS pumps have a start up time of <2 minutes, rotational speed 81000 rpm. The cooling requirements are a minimum of forced air when conditions are 5- 35 °C ambient air temperature or water cooling with minimum flow: 65 l/h (0.30 GPM) with water temperature between +15 °C to +25 °C at a water pressure of 45 to 75 psi. A PDF user instruction manual for the TwisTorr 84 FS turbo pump is available below for download.

Notes on the Agilent Varian 84FS Onboard Navigator Controller
These Varian Agilent TwisTorr 84 FS Navigator controllers are driven by a single chip microcomputer and consist of two PCBs which include power supply and 3-phase output, analog and I/O section, microprocessor and digital section. The power supply, together with the 3-phase output converts the single phase AC mains supply or 24Vdc supply into a 3-phase low voltage, medium frequency output which is required to power the pump. These controllers have a serial port RS-232/485 which allows the pump to be interfaced with the system controls and to be operated via PC with T-Plus Software. (software sold separately) on this website. These Varian Agilent TwisTorr 84 FS Navigator controllers are Brand New and come with manufacture warranty. For complete specifications, controller functions, and instruction manual please see the available PDF download below. valve.
Notes on the Agilent Varian IDP3 Dry Scroll Roughing Pump
The Agilent Varian IDP-3 dry scroll vacuum pump is a compact, high performance dry pump that provides affordable oil-free vacuum. It easily integrates with the TPS-bench system, and is suitable for a wide variety of applications. The Agilent Varian IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. The IDP-3 scroll pump is provided with an exhaust valve to prevent rapid leak-up to atmosphere when turned off. However, any vacuum pump generates a small increase in inlet line pressure when turned off. A small amount of pump debris can be carried back into a vacuum line or chamber when the pump is turned off. To prevent this the IDP3 is equipped with a external inlet isolation valve that closes automatically when the power is turned off eliminating this contamination. The IDP3 delivers a robust pumping speed of 60 l/m (2.1 CFM) and a very low base pressure of less than 2.5x10-1 Torr. The Agilent Varian IDP-3 provides all the advantages of Agilent Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package. A user friendly replacement tip seal rebuild kit for the IDP-3 is available on this website PN P102813. A PDF user instruction manual for the IDP-3 is available below for download.