The Edwards GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote. For more specs and options scroll down to AVAILABLE DOWNLOADS and download datasheet.pdf. These Edwards GX100L dry semiconductor vacuum pump are new and have Edwards part number A547-10-958 (A54710958).