The Agilent Varian VHS-10 has been designed to fill a special need in applications where high pumping speeds are required and space limitations demand a compact pump. The VHS-10 pump is a rugged, general-purpose unit with an operating range of 1.7 x 10-3 to <5 x 10-9 Torr at 4400W. The Agilent Varian VHS-10 is ideal for applications requiring fast cycling because of its high pumping speed (maximum rated at 5300 l/s with standard cold cap) air combined with high forepressure tolerance (0.65 Torr with no-load and 0.55 Torr when at full gas load). Backstreaming rate of the unit is 5x10-4 mg/cm
2/ min, without the use of any cooled cold cap.
This Agilent Varian VHS-10 Diffusion Pump Includes:
- ISO 320K Inlet Flange (14.5 inch OD Flange, No bolt holes)
- ISO 63K Outlet Foreline Flange, (3.75 inch OD Flange, No bolt holes)
- Standard Cold Cap
- Recommended Roughing Backing Pump: 30 CFM
- 5300 l/s Maximum Pumping Speed Air
- 240 VAC 3 ph (5100W) with (2) 2550 Watt Heaters
- Water Connections 1/8 in. FPT Tee
- Designed To Be Used With Santovac 5 or IVP 704 Diffusion Pump Oil, 1000cc (1.056 Qt.) full charge
Diffusion pumps use a high-speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the outlet. The oil diffusion pump is operated with an oil that has low vapor pressure. Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. The Agilent Varian VHS-10 can pump down to pressures of <5x10-9 Torr. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump, roughing pump is typically used to maintain an outlet pressure around 1 mTorr.
These Agilent Varian Diffusion Pumps are very reliable, simple in design and operate with no noise or vibration. Diffusion pumps are still the
most economical means for creating high-vacuum pressures. Diffusion pumps also tolerate operating conditions such as excess particles and reactive gases that
would destroy other types of high-vacuum pumps. They can be ordered with a 3-phase 208, 240, 380, 480 VAC heater harness and with standard or extended cold cap. We stock and sell Santovac 5 diffusion pump fluids for this pump. Please see below in our “Related” section for additional accessories that may benefit your vacuum applications and maintenance needs. We offer a large variety of vacuum greases, oils, vacuum fittings, hoses, vacuum gauges, sensors/transducers, parts and accessories sold separately on this website.
These Agilent Varian VHS-10 diffusion pumps have ISO 320K inlet flange, operate on 3-phase 240 VAC, standard cold cap and has Agilent Varian part number L5920328. The Agilent Varian VHS-10 diffusion pump user's instruction manuals can be downloaded in PDF format below. These are typical stock items that often ship same day as order is placed.
