Agilent Varian AX-65 Diffusion Pump, ISO-63K Inlet, 250 Watt Heater with Baffle, Designed For Santovac 5 Oil, 65 l/s of Air Pumping Speed
Air Cooled, Operates On 1-Phase 90 VAC, Agilent Varian Part Number L9707315

These Agilent Varian model AX-65 high vacuum diffusion pumps are air cooled and the primary industrial standard for compact high vacuum pumping. The Agilent Varian AX-65 diffusion pumps have a high pumping speed for all gases and the lowest cost per unit pumping speed when compared with other types of pumps used in the same vacuum range. The AX-65 pumps feature glass fill and drain assemblies for easy maintenance of diffusion pump fluid and continuous monitoring. These AX-65 models include a finned boiler which increases the surface area and prolongs fluid life. The full fractionating design allows vaporized fluid to be fractionated in the boiler and jet assembly. Contamination and decomposition products are pumped away and only the purest vapor reaches the top jet, assuring highest speed and lowest backstreaming.

This Agilent Varian AX-65 Diffusion Pump Includes:

Air Cooled Diffusion Pump With Fan, PN L9707315
Inlet ISO-63K, Outlet KF16
Internal Baffle (prevents backstreaming)
90VAC @ 250 Watt Heater (Designed To Be Used With Santovac 5 Oil)

Diffusion pumps use a high-speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the outlet. The oil diffusion pump is operated with an oil that has low vapor pressure (Santovac 5 or IVP 704 depending on the heater harness). Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. The Agilent Varian AX-65 can pump down to pressures of 5x10-8 Torr. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump, roughing pump is typically used to maintain an outlet pressure around 1 mTorr.

In all diffusion pumps, a small amount of backstreaming occurs. Backstreaming is the migration of minute levels of oil that move in the opposite direction, toward the inlet of the pump and into the process stream, which may be the stage of an electron microscope or a welding chamber. In some applications, minor backstreaming has no impact; in others, where the purity of materials is critical, backstreaming cannot be tolerated. For this reason, the Agilent Varian AX-65 can be OPTIONALLY equipped with a baffle to deflect oil particles before they can reach the process stream.

These Agilent Varian Diffusion Pumps are very reliable, simple in design and operate with no noise or vibration. Diffusion pumps are still the most economical means for creating high-vacuum pressures. Diffusion pumps also tolerate operating conditions such as excess particles and reactive gases that would destroy other types of high-vacuum pumps. They can be ordered with a 1-phase 90, 115, 165, or 220 VAC heater harness. We stock and sell Santovac 5 and IVP 704 diffusion pump fluids for this pump (depending on heater harness). Please see below in our “Related” section for additional accessories that may benefit your vacuum applications and maintenance needs. We offer a large variety of vacuum greases, oils, vacuum fittings, hoses, vacuum gauges, sensors/transducers, parts and accessories sold separately on this website.

These Agilent Varian AX-65 diffusion pumps have ISO-63K inlet vacuum flange, contain the 250 Watt heater and have an internal baffle installed to restrict backstreaming. This pump is designed for use with Santovac 5 oil, has a pumping speed of 65 l/s, are air cooled, being compact for easy incorporation into small laboratory instruments, operates on 1-phase 90 VAC and has Agilent Varian part number L9707315. The Agilent Varian AX 65 diffusion pump user's instruction manuals can be downloaded in PDF format below. These are typical stock items that often ship same day as order is placed.