These Agilent Varian TPS mobile systems come with an Agilent 74 FS turbo pump, having a 60 l/s pumping speed, Conflat CF 4.50 inlet flange, IDP-7 dry scroll roughing pump, and 74-FS AG rack mount controller. They are plug and play, a complete self contained ultra-high vacuum pumping systems, just plug in and pump down. All that is required is the hardware and pressure gauges necessary to connect to your chamber or vacuum process. The Agilent 74 FS turbo pump with a CF flange are true ultra-high vacuum (UHV) pumps with an ultimate pressure into the 10-10 Torr range (if all-metal intake seal gaskets are used and the vacuum chamber is completely clean and baked out). Agilent 74 FS turbo pumps with ISO-K flanges are limited (by permeation and outgassing of the rubber/elastomer O-ring seals) to an ultimate pressure in the 10-8 Torr range. The intake flange of these pumps (CF flange only) can be baked up to 100 °C when the turbo is water cooled.
Applications Include:
- UHV System Pump Down
- ION PUMP Roughing
- Lamp and Tube Processing
- Cryopump Regeneration
- High Vacuum Systems Operation
- High and Ultra High Vacuum Systems Bake Out
This Agilent Varian TPS-mobile Includes the Following Components:
- Agilent Varian 74 FS TwisTorr Turbomolecular Pump, CF 4.50 inch Inlet, 60 l/s nitrogen
- Agilent Varian 74 AG FS Rack Controller
- Agilent Varian Air Cooling Fan Kit for Rack Controller
- Agilent Varian IDP-07 Dry Scroll Roughing Pump
- CF 4.50 inch inlet screen
- Mobile cart with wheels and adjustable pump heights
- AC power cord, 3 meter
Notes on the Agilent Varian 74 FS Turbomolecular Vacuum Pump
These Agilent Varian TwisTorr 74-FS turbomolecular high-vacuum pumps have new and improved performance, including a newer designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System reduces noise, vibration, and ensures optimal bearing operating conditions to extend life, minimize system downtime, and assure stable pumping performance over long periods. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. Agilent turbo pumps are designed for optimum performance in real world applications where their compact size meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 74 FS turbo pumps require minimal to no maintenance. A PDF user instruction manual for the TwisTorr 74 FS turbo pump is available below for download.
Notes on the Agilent Varian 74FS AG Rack Controller
The TwisTorr 74FS AG Rack Controller is a microprocessor controlled frequency converter with new enhanced features that allow greater control and communication capabilities. It is a compact 1/4 rack unit designed for full worldwide compatibility 100-240 VAC. This controller has RS 232/485 connections, powers a cooling fan, drives vent valve controls, provides and acquires the pressure of the Agilent Varian wide range gauges and controls the pump operation parameters for the TwisTorr 74FS series turbo pumps. It also contains self diagnostic and protection features. This controller automatically recognizes the Agilent active gauges measuring down to 10-3 to 10-9 Torr. A PDF user instruction manual for the TwisTorr 74 FS AG Controller is available below for download.
Notes on the IDP-7 Dry Scroll Roughing Pump
The new Agilent Varian IDP-07 dry scroll vacuum pump is designed for extremely quiet < 55 dBA and low vibration operation, delivering a peak pumping speed of 5.4 cfm (9.1 m3/h) at 60 Hz, and produces an ultimate pressure of 20 mTorr. These new Agilent IDP-07 dry scroll pumps are hermetically-sealed and are appropriate for helium recirculation as well as vacuum oven, and backing pump applications. The hermetic design provides a clean gas path through the pump, which eliminates any risk of oil or grease contamination allowing the motor and bearings to run at atmospheric pressure, isolating them from exposure to vacuum process gases or water vapor. The Agilent IDP-07 supports a global single-phase motor for operating voltages ranges easily switched between 100-120V or 200-230 VAC at 50/60Hz . A PDF user instruction manual for the IDP-7 is available to the side for download.
