These Agilent Varian TwisTorr 84 FS turbomolecular vacuum pumps have an ISO 63 inlet flange, with 67 L/S pumping speed. The 84 FS turbo pumps are a supercharged version of the 74 FS, its 1350 Hz overclocked drive frequency allows for a 10% boost in pumping speed, making it a specialized pump for the ultra-high vacuum (UHV). For most general high vacuum (HV) applications, Ideal Vacuum recommends the more economic-dependable 74 FS turbo pump models. These amped-up Agilent 84 FS turbo pumps create a higher compression ratio for light gases, such as Hydrogen and Helium, to deliver an elevated throughput and reach the lowest ultimate pressure. These Agilent Varian 84 FS turbomolecular high-vacuum pumps have an ISO-63K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number X3502-64000. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 3.75x10-10 Torr when used correctly. These TwisTorr 84-FS turbo pumps require a cooling kit, either fan forced-air or water cooling, along with an outboard remote rack-mount or onboard pump-side-mounted controller, all are sold separately by Ideal Vacuum.

These Agilent Varian TwistTorr 84 FS turbo pumps have an ISO-63 inlet flange, has a pumping speed of 67 l/s of nitrogen, a KF-16 foreline flange, and ambient operating temperature from 5 °C to +35 °C. These 84 FS turbo pumps have a start up time of less than 2 minutes, rotational speed of 81,000 rpm, and recommended foreline roughing pumps of either dry scroll (IDP-3 or IDP7) or oil-sealed rotary vane (DS-40M or DS-102). The cooling requirements for forced-air cooling are ambient air temperature of 5 to 35 °C or with water cooling are a minimum flow of 0.30 gpm, between 15 to 25 °C at 45 to 75 psi.

The new Agilent Twistorr 84 FS offers a blend of performance and features that is suited for a wide range of UHV applications. It can be used in a variety of fields:

Typical Turbo Pump Applications Include:

• Mass Spectrometry
• Gas Chromatography Mass Spectrometry (GC/MS)
• Liquid Chromatography Mass Spectrometry (LC/MS)
• Inductively Coupled Plasma Mass Spectrometry (ICP-MS)
• Time-of-Flight Mass Spectrometry (TOF)

Vacuum in Research and Development:

• High Energy Physics
• Fusion Technology
• General UHV Research
• Synchrotron Light Sources Particle Accelerators

Nanotechnology Instruments:

• Electron Microscopy
• Scanning Electron Microscopy (SEM)
• Transmission Electron Microscopy (TEM)
• Focused Ion-beam Systems (FIB)
• Surface Analysis
• Semiconductor Manufacturing

Industrial Vacuum Processing:
Thin Film Deposition:

• Glass coating equipment (architectural and automotive glass, flat panel displays)
• Thin film solar cells production (photo-voltaic)
• Optical data media (CD, DVD, Magneto Optical Discs)
• Magnetic storage media
• Surface treatments
• Optical coating (ophthalmic, precision opto-electronics)
• Roll/Web coating on films or foils

Device Processing:

• TV & Monitor picture tube manufacture
• Evacuation of lamps (motorway lighting, beamers)
• X-Ray tubes & electron devices

General Processes:

• Vacuum Furnaces
• Metallurgy