These Agilent Varian Turbo-V 1001 turbomolecular high-vacuum pumps have an ISO-200K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number 9698931. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly. The Turbo-V 1001 turbo pumps have a maximize performance at minimum cost and size, with a pumping speed of 950 l/s of nitrogen (N2). We recommend a primary pump size as small as 14 CFM (e.g., IDP-15 dry scroll or DS402 rotary vane vacuum pumps) which can be used to operate the Turbo V 1001 in all its pumping profiles. The Turbo-V 1001 are compound pumps which include the MacroTorr drag stage technology to achieve the high-compression ratios for light gases and maximize the throughput of the pump.

By definition, the Navigator version of the Turbo-V 1001 has the turbo pump controller locally mounted below the turbo pump, the Navigator controller part number is 9698978. However, when the Turbo-V 1001 is powered instead by its rack-mount controller, it is not called a Navigator, it is simply called a Turbo V 1001 turbo pump. The rack-mount controller has Agilent part number X3501-64003. Agilent Varian Turbo-V 1001 Navigators (with below pump mounted controller) are often integrated into many analytical instrumentation applications, including Electron Microscopy (SEM, TEM), Focused Ion-beam Systems (FIB) and Surface Analysis Modern focused-beam systems such as SEM’s, TEM’s and FIB’s utilize columns that project electrons or ions onto microscopic samples for detailed analysis. These Agilent Varian Turbo-V 1001 Navigator turbo pumps are a key component in modern focused-beam systems because they offer fast, oil-free air evacuation of large sample chambers (oil-free operation is a key requirement of many modern analysis applications such as semiconductor manufacturing).

Agilent Varian Turbo-V 1001 Features:

• High compression ratios for light gases enabling operation at low base pressure
• Hydrocarbon free for clean vacuum system
• Remote controller allows operation from 100 m away
• Installation in any position allows easy integration
• Maintenance-free bearings for zero operating cost
• Ready for wireless control via Vacuum Link app for pump operation on the go
• Radiation and magnetic field-proof design
• No embedded electronics allows operation in demanding magnetic field and radiation environments
• Low electromagnetic emission guarantees no interferences with application process
• Low vibration and noise levels for zero impact on the system

Agilent Varian Turbo-V 1001 Specifications:

• Ambient Operating Temperature: +5 to +35 °C
• Ambient Storage Temperature: -20 to +70 °C
• Base Pressure: 1x10-8 Torr (limited by ISO O-ring seal)
• Compression Ratio H2: 1 x 10^6
• FlangeType: Conflat CF 10 Inch
• Foreline Flange Size: KF 40 NW
• Maximum Gas Throughput - Ar, Water Cooling: 7.5 mbar L/s; 444 sccm
• Maximum Gas Throughput - N2, Water Cooling: 10 mbar L/s; 592 sccm
• Noise Level: 45 dB(A)
• Nominal Rotation Speed: 38 KRPM
• Operating Position: Any
• Pumping Speed - H2: 900 L/s (ISO-200 Inlet flange)
• Pumping Speed - He: 870 L/s (ISO-200 Inlet flange)
• Pumping Speed - N2: 950 L/s (ISO-200 Inlet flange)
• Recommended Forepump Capacity: 15 m³/h
• Start Up Time: < 4 min
• Weight: 21.2 kg