These Agilent Varian Turbo-V 1001 turbomolecular high-vacuum pumps have a Conflat 10 inch inlet flange, an ultimate pressure of 1x10-10 Torr, and Agilent Varian part number 9698932. The Turbo-V 1001 turbo pumps have a maximize performance at minimum cost and size, with a pumping speed of 950 l/s of nitrogen (N2). We recommend a primary pump size as small as 14 CFM (e.g., IDP-15 dry scroll or DS402 rotary vane vacuum pumps) which can be used to operate the Turbo V 1001 in all its pumping profiles. The Turbo-V 1001 are compound pumps which include the MacroTorr drag stage technology to achieve the high-compression ratios for light gases and maximize the throughput of the pump. The Agilent Varian Turbo-V 1001 turbo pumps, with conflat intake, are true ultra-high vacuum (UHV) pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly, for example, the Conflat versions of these pumps allow the intake flange to be baked up to 120 degrees Celsius.

By definition, the Navigator version of the Turbo-V 1001 has the turbo pump controller locally mounted below the turbo pump, the Navigator controller part number is 9698978. However, when the Turbo-V 1001 is powered instead by its rack-mount controller, it is not called a Navigator, it is simply called a Turbo V 1001 turbo pump. The rack-mount controller has Agilent part number X3501-64003. Agilent Varian Turbo-V 1001 Navigators (with below pump mounted controller) are often integrated into many analytical instrumentation applications, including Electron Microscopy (SEM, TEM), Focused Ion-beam Systems (FIB) and Surface Analysis Modern focused-beam systems such as SEM’s, TEM’s and FIB’s utilize columns that project electrons or ions onto microscopic samples for detailed analysis. These Agilent Varian Turbo-V 1001 Navigator turbo pumps are a key component in modern focused-beam systems because they offer fast, oil-free air evacuation of large sample chambers (oil-free operation is a key requirement of many modern analysis applications such as semiconductor manufacturing).

Agilent Varian Turbo-V 1001 Features:

• High compression ratios for light gases enabling operation at low base pressure
• Hydrocarbon free for clean vacuum system
• Remote controller allows operation from 100 m away
• Installation in any position allows easy integration
• Maintenance-free bearings for zero operating cost
• Ready for wireless control via Vacuum Link app for pump operation on the go
• Radiation- and magnetic field-proof design
• No embedded electronics allows operation in demanding magnetic field and radiation environments
• Low electromagnetic emission guarantees no interferences with application process
• Low vibration and noise levels for zero impact on the system

Agilent Varian Turbo-V 1001 Specifications:

• Ambient Operating Temperature: +5 to +35 °C
• Ambient Storage Temperature: -20 to +70 °C
• Base Pressure: <1 x 10-10 Torr
• Compression Ratio H2: 1 x 10^6
• FlangeType: Conflat 10 Inch
• Foreline Flange Size: KF 40 NW
• Maximum Gas Throughput - Ar, Water Cooling: 7.5 mbar L/s; 444 sccm
• Maximum Gas Throughput - N2, Water Cooling: 10 mbar L/s; 592 sccm
• Noise Level: 45 dB(A)
• Nominal Rotation Speed: 38 KRPM
• Operating Position: Any
• Pumping Speed - H2: 900 L/s (CF 10 Inch flange)
• Pumping Speed - He: 870 L/s (CF 10 Inch flange)
• Pumping Speed - N2: 950 L/s (CF 10 Inch flange)
• Recommended Forepump Capacity: 15 m³/h
• Start Up Time: < 4 min
• Weight: 21.2 kg