This is an Edwards vacuum pump exhaust check valve kit. It typically is used to help prevent air from rushing backward through the pump during powered down. They are simply a one-way valve, and are designed to inhibit the backwards airflow. Even with one of these check valves installed the pump will eventually increase to atmospheric pressure. These check valves are helpful in efforts to prevent process powder from being swept backwards with a large air rush. They are typically used on Edwards dry semiconductor pumps, iH, QDP, & iQDP dry pumps.

Exhaust Check Valve Kit Includes:
(2) KF-40 Hinge Clamps
(2) KF-40 Overpressure Centering Rings
(1) KF-40 Exhuast Check Valve
(1) KF-40 90 Degree Elbow Stainless Steel