The Advanced Energy NAVIO RF Match Network is a high-performance solution designed to optimize RF power delivery for plasma processes. Operating at 13.56 MHz with a tuning range of 0 to 1,000 W, this RF match network ensures precise impedance matching for maximum process efficiency. Is ideal for various applications, including plasma processing, thin-film deposition, and etching. Its robust design and precise control make it suitable for demanding environments. This listing is for a new Advanced Energy NAVIO RF Match Network, 13.56 MHz, 0 to 1,000 W Tuning Range, 50 Ohm Input Impedance, 1-Phase 100-240 VAC 50/60 Hz, MC 6 mm for Plasma Busbar Connector, Air-Cooled, and having Advanced Energy part number PN: 3155401-001.

Key Features

• Frequency: 13.56 MHz
• Output Power: 0 to 1 kW
• Output Connector: MC 6 mm for Plasma Busbar
• Input Impedance: 50 Ohm
• Input Voltage: 1-Phase 100-240 VAC 50/60 Hz
• Cooling: Air-cooled design
• Communiction: Analog & RS-232
• Part Number: 3155401-001

Ideal for semiconductor manufacturing and other RF plasma applications, the NAVIO RF Match Network delivers exceptional performance and durability. Ideal Vacuum provides a wide range of Advanced Energy NAVIO match networs. If your specific part number is not listed on our website, please contact us for a quote. These match networks are available with customizable options, including variations in input connector styles, frequencies, output connector styles, operating voltages, and more. For detailed specifications and additional information, refer to the user manual and brochure available in the product's related downloads section.