Bruker DektakXT-A Stylus Profilometer, DXT Surface Profile Measurement System.

This Bruker DektakXT® stylus profilometer is an Advanced Stylus Profilometer, (DXT-A) with a 3D automated surface mapping and analysis capability that include stitching for up to 200mm scans . It features a revolutionary benchtop design that enables an unmatched repeatability of 4Å and up to 40% improvement in scanning speeds. In addition to all of the functionality needed to collect accurate step height and surface roughness measurements.

This DektakXT-A system includes:

Dell OptiPlex PC, with Win10 Pro operating system and Bruker Vision64 software
Four air isolated feet
Motorized X/Y stage with 6inches of travel, motorized 360 degree rotation
includes 2-3, 4-6, or 8" vacuum chuck as standard with the system
LIS 3, low inertia sensor with 1 to 15mg of force
3.1Mpixel color camera with selectable magnification
Starter stylus (choose 2um or 12.5um)
Optically flat scan block with 55mm scan length
4 Å step height repeatability, 1 sigma on 1um step
Stitching for up to 200mm scans
3D map collection and extensive data analysis
Automated collection capabilities with unlimited number of locations
1-year limited factory warranty

Dektak XT facility requirement, dimensions, weight and heat load

Table 1 lists the facility requirements of the DektakXT system. Table 2 lists its dimensions, weight, and heat load.

POWER
DXT-110V - 100/115 VAC OPERATION
Configure Power for 100/115 VAC operation. Ready for operation in the United States and countries operating on 100/115 volts with standard 3-prong US outlets.

ENVIRONMENTAL ENCLOSURE DXT-ENC - DXT environmental enclosure is included.

COMPUTER
A 64bit Desktop Computer from Bruker is included. Dell OptiPlex, Win10 Pro operating system, 3.2GHz processor, Intel Core i5, 4GB (1x4G) 1600MHz DDR3L Memory, 500GB hard disk drive with Vision64# Operation and Analysis Software.

COMPUTER MONITOR A VGA compatible monitor is required. Monitor MUST support 1920x1080 @ 60HZ resolution, include a DVI-D port, and be DisplayPort compatible. The system does not come with the monitor and is not included in the base price. However, upon request, a brand new compatible monitor can be invoiced and supplied.

XY STAGE
DXT-AUTO - MOTORIZED XY 150 X 150MM STAGE, R STAGE

DXT-R-AUTO - MOTORIZED R-THETA DXT-S/A SAMPLE PLATTER OPTIONS
DXT-SET-WVC - WAFER VACUUM CHUCK PACKAGE 1,620.00 1,620.00
Wafer Vacuum Chuck Package
This wafer vacuum chuck package consists of: 2-3" (838-203), 4-6" (838-189), and 8" (838-195) wafer vacuum chucks. Price is in addition to base system price.

STARTER STYLUS
DXT-STYL-2UM-B - STYLUS, LIS 3, 2UM RAD-TYPE B
This starter stylus with 2um radii stylus tip comes free of charge with this system for immediate operation after installation. It does not include an SEM image of the tip. APPLICATION PACKAGES

DXT-STITCH - STITCHING CAPABILITY The Vision64#Stitching capability allows DXT-A systems to stitch multiple scans together generating a seamless scan that covers 6inches (150mm) of motorized travel. It is most useful in 2D film stress measurement on silicon wafers and samples of similar flatness. The stitching capability is included on this DektakXT Advanced System (DXT-A). DXT-3D MAP - 3D MAPPING & ANALYS CAPABILITY The Vision64 3D mapping capability includes live time visualization of 3D maps as they are collected on DXT-A Advanced Systems. 3D Mapping offers the ability to generate 3D datasets of all sizes, including large maps with the use of stitching. The full suite of Vision64 3D analyses are available with this capability for advanced filtering and manipulation of the datasets.

DXT-2D STRESS - 2D STRESS MEASUREMT CAPABILITY The Vision64 2D Stress Measurement capability calculates tensil and compressive stress simultaneously. Utilizing a 5th order polynomial fit and user selectable elasticity constant the 2D stress capability achieves accurate results. It can be used in combination with Stitching capability to measure larger areas on flat wafers on the DXT-Advanced systems. Systems ordered with a wafer vacuum chuck includes chromed ball-bearings and pen magnet.

DXT-AUTOMATION - AUTOMATED MEASUREMENT COLLECTION The Vision64 Automation capability offers automatic collection of linescans and 3D maps in multiple locations. Operators can conduct a series of analyses with the simple click of a button using automation recipes. This DXT-A standard functionality is beneficial in production QA/QC environments where the repetitive measurements in multiple locations on a sample are required.

CUSTOMER INSTALLATION KIT The DektakXT is designed to be self-installable with this kit. An instructional video will be provided to walk our customers through unpacking, setup, and initial verification of system functionality. An additional set of videos is provided to walk operators through data collection and analyses. This comprehensive set of short videos makes operators quickly proficient on DXT operation and can be used as reference throughout the operational life of the system.