The Anest Iwata DVSL-501E oil-free dry scroll pumps operate on a three phase motor 200-230/380-460 VAC, 50/60 Hz. Displacement for this Anest Iwata DVSL-501E is 18.4 CFM at 60hz, ultimate pressure 7.5x10^-1 Torr. This pump offers high performance, compact design and very light, is economical and inexpensive to operate. Little routine maintenance, no oil changes, filters or foreline traps to replace. Excellent alternative to oil sealed rotary vane pumps. This pump has a three-phase motor. The operating instructions manual is available for down in PDF format below.

APPLICATIONS

• Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
• Accelerator, Synchrotron Radiation
• Surface modification, Electron beam process
• Gas recovery devices
• Vacuum equipment
• Leak detectors
• Device handling system
• Vacuum furnace, Heat treatment furnace
• Laboratory use
• Vacuum packaging machine

The Anest Iwata ISP series of vacuum pumps offer a clean vacuum environment and eliminate the nuisance of cumbersome lubricant maintenance or sealing water administration. The ISP series is free from installation restrictions because of its air-cooled system. ISP vacuum pumps maintain low power consumption from atmosphere to maximum pressure.