The Anest Iwata DVSL-100C-B oil-free dry scroll pumps operate on a single phase 100-115/200-230 VAC, 50/60 Hz. Displacement for this Anest Iwata DVSL-100C-B is 4.2 CFM at 60hz, ultimate pressure 3.8x10^-1 Torr. This pump offers high performance, compact design and very light, is economical and inexpensive to operate. Little routine maintenance, no oil changes, filters or foreline traps to replace. Excellent alternative to oil sealed rotary vane pumps. This pump has a single-phase motor. The operating instructions manual is available for down in PDF format below.

Pumping of humid gas by vacuum pump can cause condensed moisture to remain in pump. This remaining moisture can cause failure to ultimate pressure or pump. Air Flush operation is necessary to pump remaining moisture inside the pump. Air Flush operation dose not only pump remaining moisture but also recovers ultimate pressure.

APPLICATIONS

• Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
• Accelerator, Synchrotron Radiation
• Surface modification, Electron beam process
• Gas recovery devices
• Vacuum equipment
• Leak detectors
• Device handling system
• Vacuum furnace, Heat treatment furnace
• Laboratory use
• Vacuum packaging machine

The Anest Iwata ISP series of vacuum pumps offer a clean vacuum environment and eliminate the nuisance of cumbersome lubricant maintenance or sealing water administration. The ISP series is free from installation restrictions because of its air-cooled system. ISP vacuum pumps maintain low power consumption from atmosphere to maximum pressure.