The Ebara EBT70 mechanical ceramic bearing compound turbomolecular pump with ISO-K 63 is highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high vacuum applications. The EBT70 turbopump offer exceptional value and is equipped with precision ceramic bearings for years of trouble free operation (>30,000hrs before replacement). The new compound design rotors can withstand infrequent shock treatment during high flow or vent conditions. Improved efficiency results in higher pumping speeds and gas compression. This accommodates higher foreline pressures making them ideal for multiple applications including UHV, mobile vacuum carts and analytical systems.

Ebara EBT Models Features and Benefits:

• Rugged Bearing Design Ideal for Mobile Applications
• High Pumping Speeds
• High Compression Ratios for Light Gases
• Fast Starts and Stops
• Quick Venting (No Vent Pulsing)
• Fan or Water Cooling (Not Included)
• ISO or Conflat (CF) Flanges
• Integrated Controller (Selected Models)

Typical Turbo Pump Applications include:

• Semiconductor
• Thin Film
• Photovoltaic
• Mass Spectrometry
• Analytical Instruments Lamps
• Surface Treatment
• Electron / X-Ray Tubes
• Ion / EB-Source
• Wafer Bonding
• Sputter
• Glass / Film Coating
• Exhaust Carts

The pump instruction manual and Ebara EBT turbopump product brochures are available in the downloads.