This new mXDS3 dry scroll pump delivers a 2.0 CFM (3.3 m³h^-1) maximum pumping speed together with an ultimate pressure of 75 mTorr making it well suited for backing turbomolecular pumps. The mXDS3 version is the standard option supplied with no inlet valve fitted, while the mXDS3s comes factory fitted with an inlet valve, featuring delayed opening, and supplied with an exhaust silencer. Both offer the same vacuum performance and feature an IEC connector for the main supply and an on/off switch for easy control. This compact dry pump offers flexibility to the system designer and end user alike with a wide range of accessories available to choose from to meet your configuration requirements.

The Edwards mXDS3 is a small dry alternative to oil-sealed rotary vane and diaphragm vacuum pumps of a similar capacity. The mXDS3s version offers, as standard, configured with an inlet valve accessory and exhaust silencer/filter. The compact and lightweight mXDS3 weighs in at just 17.2 lbs. (7.8 kg.) and comes with a carrying handle making it highly portable. For system builders, the pump can typically be mounted horizontally or vertically, the inlet connection can also be reconfigured to flow vertically or horizontally with a push fit connector that is sold as an accessory.

The Edwards mXDS3 and mXDS3s compact dry scroll pumps deliver 2 CFM (3.3 m³h^-1) peak pumping speed and 75 mTorr ultimate pressure. In comparison with other compact pumps, its high pumping speed and good ultimate vacuum make the mXDS well suited for backing turbomolecular pumps. These small scroll pumps have a gas ballast facility incorporated in the design as standard for water vapor handling and an internal exhaust valve just like the larger nXDS pumps. The Edwards mXDS3 and mXDS3s are clean oil-free pumps with no oil to top up, replace or dispose of. They typically have a lower power requirement compared to similar capacity pumps making them great for energy savings, an ideal choice for helping to reduce your carbon footprint. The optimized fan cooling is beneficial in reducing noise for quieter operation and a pleasant working environment.

APPLICATIONS General clean pumping applications Scanning Electron Microscopes - SEM Beam lines and high energy physics Mass Spectrometry Electron Microscopy Sample Preparation Research and Development High Energy Physics Industrial Semiconductor Backing turbo pumps Centrifuges, ultra-high speed Coating Cryogenics Degassing/curing - oil, epoxy resin Distillation/extraction/filtration Laboratory bench top vacuum Lasers, gas recovery and recirculation Research and development Surface science instruments