Ebara ESR20N Multistage Dry Vacuum Pump, Pumping Speed 45 to 70 CFM (1300 - 2000 l/m), Clean to Medium Duty Processes, Water Cooled, 3-Phase, 200-220V, 60Hz.
Ebara Part Number: 202093.

The Ebara ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The Ebara ESR Series covers a wide pumping speed from 45 to 706 CFM with an ultimate pressure as low as 1.5 mTorr. This listing is for the sale of the Ebara ESR20N Multistage Dry Vacuum Pump, 120cfm 2000l/m, Clean to Medium Duty Processes, Water Cooled, 200-220V / 3Ph, PN: 202093.

Applications

Sputtering
PVD
Load Lock and Transfer
Ashing
Ion Implanter
Etch
Clean Gases and Processes

Benefits and Features of the Ebara EV-A series dry rotary lobe pumps.

Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
No Nitrogen purge required for ESR20N in clean applications
Variable pumping speed to match application requirements
High performance brushless DC motors
State-of-the-art control and monitoring devices
Idle mode can be employed for increased utility savings
SEMI S2 assessed, NRTL Listed, CE Marked