Leybold TURBOVAC 950i Turbo Vacuum Pump with Conflat 10.0 Inch Inlet , 925 l/s Pumping Speed, Air or Water Cooled.
Leybold Part Number: 840111V1000.
These Leybold TURBOVAC 950i turbomolecular high-vacuum pumps have a pumping speed up to 925 liters per second (l/s), with a Conflat CF 10.0 inch inlet flange, and an ISO KF-25 exhaust foreline flange. These i-series turbo pumps require 48 VDC input power at a maximum of 600 Watts and have an integrated controller. All TURBOVAC i-series turbo pumps include a compact standard interface with RS485, USB and Digital I/O interfaces with 3 status LED's and the possibility to control one accessory (air cooler, valves, relay box...). All that is needed is a power supply, start/stop logic and either air or water cooling. Power supply and air or water cooling kits are available and sold separately. These 950i pumps have Leybold part number 840111V1000.

Leybold TURBOVAC 950i Specifications:

Part Number: 840111V1000
Inlet Flange: Conflat CF 10.0 inch
Base Pressure: 3 x 10^-10 mbar (2.2 x 10^-10 Torr)
Operating Speed: 49200 RPM
Operating Position: Any
Pumping Speed: 925 l/s
Cooling: Forced Air or Water
Exhaust Flange: KF-25
Operating Voltage: 48 VDC
Maximum Power: 600 Watts
Compact Standard Interface with RS485, USB and Digital I/O
One accessory port
Recommended Roughing Pump:TriVac D8B or ScrollVac SC10

TURBOVAC 950i pumps with a CF flange are true ultra-high vacuum (UHV) pumps with an ultimate pressure into the 10^-10 Torr range (if all-metal intake seal gaskets are used and the vacuum chamber is completely clean and baked out). Leybold TURBOVAC 950i turbo pumps with ISO-K flanges are limited (by permeation and outgassing of the rubber/elastomer O-ring seals) to an ultimate pressure in the 10^-8 Torr range. The intake flange of these pumps (CF flange only) can be baked up to 100 °C when the turbo is water cooled.

You can choose to power the pump from your instrument’s auxillary power source or purchase the Leybold TURBO.POWER 800 integra power supply. The TURBO.POWER 800 integra is a local power supply only, which is mounted to the bottom of the turbo pump. The Leybold TURBOVAC i-series pumps, with the TURBO.POWER 800 integra power supply mounted under the pump, is a compact, low-cost, high-vacuum pumping solution that is often integrated into many analytical instrumentation applications, including Electron Microscopy (SEM, TEM) and Focused Ion-beam Systems (FIB).

Designed to offer maximum performance, the Leybold TURBOVAC i-Series turbomolecular vacuum pumps feature a cutting-edge rotor and drag-stage design which provide unparalleled speed, especially for light gases. A wide selection of interface options, housing and flange configurations as well as accessories completes this product line. The unique oil-free hybrid bearing system with maintenance-free ball bearings will boost your productivity and reduce cost of ownership. With a light gas pumping speed of up to 60% above current reference products and compression values around 100 times higher than previous generation products, they are especially suitable for operation with small backing pumps. Your benefits: a considerably smaller vacuum system, lower initial and operating costs along with a more compact footprint.

Performance:

Industry-leading pumping speed for light gases (up to 60% higher than existing products)
Optimized rotor diameter to provide maximum pumping performance

Flexibility:

Vacuum port design flexibility
Rotatable fore-vacuum port
Onboard turbo controller
Only requires power along with start/stop logic
Compact design with optional TURBO.POWER 800 integra

Installation, operation and control:

Integrated 48V DC drive electronics to avoid expensive cabling
Widest range of communication interfaces: USB, RS485, and remote 15 pin digital I/O as standard options
Highly efficient motor
Thermal isolation by design for optimized cooling of bearing and improved pump lifetime
Innovative shaft support system reduces vibration
Maintenance free upper passive magnetic bearing
Oil free, lifetime lubricated, lower mechanical ceramic ball bearing is field-replaceable

The Leybold TURBOVAC i-series turbo pumps are plug and play. They are simple and easy to install, operate and control, thanks to their flexible product design, integrated electronics, and a wide range of communication interfaces. They offer superior reliability due to an innovative pump design and the unique oil-free hybrid bearing concept with maintenance-free ball bearings available in the market today. The innovative shaft support system reduces vibration, noise, mechanical stress, and alleviates potential negative impact on vibration sensitive applications. Optimized cooling of the bearings is ensured through thermal isolation and a highly efficient motor. The pump is also equipped with a purge port to protect the bearings from critical gases and particles. As a result, the up-time and lifespan of the pump as well as your productivity are increased considerably. In combination with low costs of ownership, your vacuum system will be more efficient than ever.

Typical Turbo Pump Applications include:

General clean pumping applications
Scanning Electron Microscopes - SEM
Beam lines and high energy physics
Mass Spectrometry
Electron Microscopy
Sample Preparation
Research and Development
High Energy Physics
Industrial
Semiconductor
Coatings
Surface Science Instruments

The operating instructions manual and Leybold i-series TURBOVAC product brochures are available in the downloads.