Edwards iQDP-40 and iQDP-80 Gas Module Mass Flow Meter 3810 - 60 L/MIN Replacement.
The Edwards iQDP-40 and iQDP-80 dry semiconductor vacuum pump has a series II gas module that provides nitrogen flow rates to the vacuum pump. These nitrogen flows are needed to purge sections of the pump and provide cooling to the dry shaft seals. As these pumps age the mass flow controllers inside the gas module can become defective. Our replacement mass flow controller 3810 are designed as drop in new calibrated replacement parts. These regenerate the gas module so that it will provide the correct flows to the vacuum pump.

Ideal vacuum offers rebuild service for all Edwards iQDP-40 and iQDP-80 dry semiconductor pumps with all blower combinations available. Please contact us for iQDP pump or iQDP gas module rebuild service - 505-872-0037.